|
|
Home Page
1200C Dual Zone HPCVD Furnace with Sequential & Co-Deposition Source Feeding System up to 6 Crucibles) - OTF-1200X-II-HPCVD-SE
|
|
Please email for lead time
Item Number: OTF-1200X-II-HPCVD-SE
Transported by LTL Freight (Truck)
Personalization
Upgrade to Eurotherm Temp Controllers (Dual )
|
OTF-1200X-II-HPCVD-SE is a hybrid PVD and CVD ( HPCVD) deposition system with six evaporation sources for preparing multilayer 2D materials. The system consists of a dual-zone split tube furnace with the unique Source Feeding System that can drive the crucibles into a processing tube at desired evaporating temperature. The two-zone split tube furnace can achieve fast heating up to 1200°C and create a different thermal gradient by setting the different temperatures for each zone. The source feeding system can push and draw 1 or 2 crucibles with evaporation material through the atmosphere controlled the tube furnace and sequentially evaporate 6 types of materials or co-evaporating of three materials at a time as programed. This is an ideal solution to conduct HPCVD experiments, especially for preparing multi-layer 2D crystal materials. Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each source. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting.
SPECIFICATIONS:
| Furnace Structure |
- Features a unique Dual Channel source feeding system that drives crucibles with evaporation material through the vacuum or atmosphere controlled tube, suitable for Hybrid Physical CVD-Growth of Multi-layer Film Stacks as programed.
- Two independent temperature controllers to control each zone's temperature.
- A double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- High purity fibrous alumina insulation for maximum energy saving.
- The special refractory coating on the liner and heating element helps increase furnace service life.
- Split cover with Interlock protection, cut the power if the door opens during the furnace heating process.
   |
| Power Requirement |
- Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
|
| Heating Zone Length |
- Two zones: each zone length is 8.6" (220 mm)
- Total 17.3" (440 mm) heating zone
|
Constant Temp. Zone
|
- Constant temperature zone ( about 260mm +/-2°C ) can be created by setting both zones at the same temperature
- Please click the picture below to see the detailed temperature uniformity profile at 800°C.
|
| Temperature Range |
100~1100°C (Continuous); 1200°C (<1 hour) |
| Max. Heating Rate |
≤ 10°C /min |
| Sequential Source Feeding System |
- One thermocouple connects to the crucible from the left flange. The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring.
- Four crucibles can be simultaneously placed into the source feed system and sequentially delivered to the quartz tube under vacuum or inert gas conditions (or co-deposition up to 2 sources at a time, please refer to bottom right picture for details)
  
|
| Crucible Movement Control |
- The crucible moving speed and distance are controlled by a stepper motor.
- Crucible traveling distance: 530mm max.
|
Temperature Controllers
|
- Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1ºC temperature accuracy.
- Two K-type thermocouples (one for each zone).
- RS485 Communications Port.
- Eurotherm 3000 controller is optional with +/- 0.1ºC accuracy at the extra cost.
|
Tube Accessories
|
- One fused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included.
- 4 quartz boat are included for evaporation
|
Digital Vacuum Gauge
|
- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
- Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
|
Vacuum Pump
|
|
Gas Flow Control System
 |
|
Dimensions
|
 2400mm(L) x 600mm(W) x 1300mm(H) |
| Warranty |
One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.) |
Laptop, software & WiFi Control (Optional)
 
|
- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
- Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
- The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- Note: The software is only compatible with MTI’s Yudian Temperature Controller
|
| Compliance |
- CE Certified
- NRTL or CSA certification is available at extra cost.
|
Application Notes
Click here to learn the installation of a gas regulator.
|
|
Operation Instructions
|
|
|
Sale Price: Starting at USD$4,698.00
|
|
|
|
|
|
|
|
|
| |
|
| | |
|
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed. | |
| | |
|
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop
MTI-UCSD Battery Fabrication Lab
MTI Sponsors the Postdoctoral Awards
Upcoming Shows:
|
|