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1200C Dual Zone HPCVD Furnace with Sequential & Co-Deposition Source Feeding System up to 6 Crucibles) - OTF-1200X-II-HPCVD-SE
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Item Number: OTF-1200X-II-HPCVD-SE
Transported by LTL Freight (Truck)
Personalization
Upgrade to Eurotherm Temp Controllers (Dual )
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OTF-1200X-II-HPCVD-SE is a hybrid PVD and CVD ( HPCVD) deposition system with six evaporation sources for preparing multilayer 2D materials. The system consists of a dual-zone split tube furnace with the unique Source Feeding System that can drive the crucibles into a processing tube at desired evaporating temperature. The two-zone split tube furnace can achieve fast heating up to 1200°C and create a different thermal gradient by setting the different temperatures for each zone. The source feeding system can push and draw 1 or 2 crucibles with evaporation material through the atmosphere controlled the tube furnace and sequentially evaporate 6 types of materials or co-evaporating of three materials at a time as programed. This is an ideal solution to conduct HPCVD experiments, especially for preparing multi-layer 2D crystal materials. Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each source. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting.
SPECIFICATIONS:
| Furnace Structure |
- Features a unique Dual Channel source feeding system that drives crucibles with evaporation material through the vacuum or atmosphere controlled tube, suitable for Hybrid Physical CVD-Growth of Multi-layer Film Stacks as programed.
- Two independent temperature controllers to control each zone's temperature.
- A double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
- High purity fibrous alumina insulation for maximum energy saving.
- The special refractory coating on the liner and heating element helps increase furnace service life.
- Split cover with Interlock protection, cut the power if the door opens during the furnace heating process.
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| Power Requirement |
- Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
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| Heating Zone Length |
- Two zones: each zone length is 8.6" (220 mm)
- Total 17.3" (440 mm) heating zone
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Constant Temp. Zone
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- Constant temperature zone ( about 260mm +/-2°C ) can be created by setting both zones at the same temperature
- Please click the picture below to see the detailed temperature uniformity profile at 800°C.
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| Temperature Range |
100~1100°C (Continuous); 1200°C (<1 hour) |
| Max. Heating Rate |
≤ 10°C /min |
| Sequential Source Feeding System |
- One thermocouple connects to the crucible from the left flange. The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring.
- Four crucibles can be simultaneously placed into the source feed system and sequentially delivered to the quartz tube under vacuum or inert gas conditions (or co-deposition up to 2 sources at a time, please refer to bottom right picture for details)
  
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| Crucible Movement Control |
- The crucible moving speed and distance are controlled by a stepper motor.
- Crucible traveling distance: 530mm max.
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Temperature Controllers
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- Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over-temperature protection and alarm allow for operation without attendant(s).
- +/- 1ºC temperature accuracy.
- Two K-type thermocouples (one for each zone).
- RS485 Communications Port.
- Eurotherm 3000 controller is optional with +/- 0.1ºC accuracy at the extra cost.
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Tube Accessories
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- One fused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included.
- 4 quartz boat are included for evaporation
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Digital Vacuum Gauge
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- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
- Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
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Vacuum Pump
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Gas Flow Control System
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Dimensions
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 2400mm(L) x 600mm(W) x 1300mm(H) |
| Warranty |
One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.) |
Laptop, software & WiFi Control (Optional)
 
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
- Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
- A wireless remote control provides up to 300 meters of operating range.
- The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
- Note: The software is only compatible with MTI’s Yudian Temperature Controller
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| Compliance |
- CE Certified
- NRTL or CSA certification is available at extra cost.
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Application Notes
Click here to learn the installation of a gas regulator.
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Operation Instructions
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Sale Price: Starting at USD$4,698.00
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