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1200C Dual Zone Split Tube Furnace w/ Sample Feeding System upto 4 Crucibles For HPCVD - OTF-1200X-II-ZL


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Item Number: OTF-1200X-II-ZL
Transported by LTL Freight (Truck)

Personalization

Upgrade to Eurotherm Temp Controllers (Dual )
OTF-1200X-II-ZL is a hybrid PVD and CVD  ( HPCVD) deposition system with four evaporation sources for preparing multilayer 2D materials up to 1200oC.  The system is consists of a dual-zone split tube furnace with the revolving sample feeding system that can drive the crucible into a processing tube at the desired temperature in the different position of the heating zone. The revolving feed system can push and draw a crucible with evaporation material through the atmosphere controlled tube furnace and sequentially evaporate the material one by one up to four crucibles as the program.  Its built-in PLC touchscreen allows users to manage the feeding method and monitor the temperature of each sample. Two 30-segment programmable PID temperature controllers provide excellent control without temperature overshooting

SPECIFICATIONS:
Furnace Structure
   
  • Two independent temperature controllers to control each zone's temperature.
  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • The special refractory coating on liner and heating element helps increase furnace service life.
  • Split cover with Interlock protectioncut the power if the door opens during the furnace heating process.       
Power Requirement
  • Single Phase 208~240VAC, 3KW (20Amp circuit breaker is required)
Heating Zone Length
  • Two zones: each zone length is 8" (200 mm)
  • Total 16" (400 mm) heating zone
Constant Temp. Zone

  • 150mm (+/-1°C) for each heating zone
  • A longer constant temperature zone ( about 250mm ) can be created by setting both zones at the same temperature 
  • Please click the picture left to see the detailed temperature uniformity profile at 800°C           
Temperature Range 100~1100°C (Continuous); 1200°C (<1 hour) 
Max. Heating Rate ≤ 20°C /min
Revolving Feeding Stock System
  • One thermocouple connects to the crucible from the left flange (Pic.1). The stepper motor drives the crucible to travel through the tube together with the thermocouple for real-time temperature monitoring.
  • Four crucibles can be simultaneously placed into the revolving feed system and sequentially delivered to the quartz tube under vacuum or inert gas one by one  (Pic.2, 3 & 4).
  •     Pic.1      Pic.2        Pic.3       Pic.4                           
Crucible Movement Control
  • The crucible moving speed and distance are controlled by a stepper motor.
  • Crucible traveling distance: 1mm ~ 200mm
  •                  
Temperature Controllers
       
  • Two digital controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1ºC temperature accuracy.
  • Two K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace can be operated by PC with an MTS02-Y Temperature control software package (include 2 communication chips and one 15" laptop). 
    • Eurotherm 3000 controllers are available with +/- 0.1ºC accuracy at the extra cost.              
Tube Accessories
  • One fused quartz tube (60mm O.D. x 54mm I.D. x 1000mm L) is included.
  • Four quartz crucibles for evaporation are included
Digital Vacuum Gauge
Vacuum pressure gauges
  • Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with the presence of corrosive gases.
  • Provides a wide range (3.8E-5 ~ 1125 torr) of measurement.
Vacuum Pump

Gas Flow Control System
Water Chiller

Dimensions

   2400mm(L) x 600mm(W) x 1300mm(H)   
Warranty One year limited warranty with lifetime support. (Consumable parts such as processing tubes, o-rings are not covered by the warranty, please find the replacements at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record, and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). 
    • Compliance
    • CE Certified
    • NRTL  or CSA certification at extra cost. (please click marks below to learn details)
                          
    Application Notes

      
    Click here to learn the installation of a gas regulator.
    Operation Video


    How to operate the furnace Controller Operation Demo Video How to create a Temperature gradient
           

                

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    Notices
    1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor costs.
    3. The prices listed are subject to change without notice.