1200C Max. PECVD Tube Furnace w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV

• Lower temperature processing compared to conventional CVD. 
• Film stress can be controlled by high/low frequency mixing techniques. 
• Control over stoichiometry via process conditions.
• Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.

Split Tube furnace	1200oC Max. working temperature for < 60 minutes 1100oC Max for continuous heating 30 segments programmable precision digital temperature controller 440 mm length single heating zone and 150 mm length constant temperate zone High purity quartz tube optional from ( click the optional bar to choose ) One pair of the vacuum-sealed flange with valves 2"OD x 1.7"ID x  48" Length  3.14"OD x 2.83"ID x 48'' Length Input power: 208 – 240V AC input, a single phase at max. 4KW Two zones split furnace -OTF1200X-II is optional at extra cost
Plasma RF Power Supply	Output Power:          5 -300W adjustable with ± 1% stability RF frequency:          13.56 MHz ±0.005% stability Reflection Power:     200W max. Matching:                Automatic RF Output Port:       50 Ω, N-type, female Noise:                    <50 dB.  Cooling:                  Air cooling. Power:                   208-240VAC, 50/60Hz Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange
Anti-corrosive Pressure Gauge	3.8x10-5 to 1125 Torr measurement range Anti-corrosive, gas-type independent  High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection Fast atmospheric detection eliminates waiting time and shortens the process cycle Easy to exchange plug & play sensor element Click the picture to view detailed spec
Vacuum Pump and valve	Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.  KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve  Digital vacuum pressure gauge and display are installed with the furnace
Optional Oilless Pump	Please order the oilless pump for zero contamination:
Mass Flowmeter       EQ-GSL-LCD	4-channeled Gas Mixing Made of 316 stainless steel valve Gas mixing tank: Φ80X120mm   600mm(L) x 745mm(W) x 700mm(H) 6" color touch screen control panel to make parameter setting at easy. Touchscreen Control and PC remote switchable. 23W per channel  AC 220V/50Hz Single phase
Temperature Controller	MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time. Built-in PID Auto-Tune function with overheating & broken thermocouple protection. Over-temperature protection and alarm allow for operation without attendant(s). +/- 1 ºC temperature accuracy. RS485 Communications Port. MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detailed information about the MTS02-Y software kit.  You may upgrade the temperature controller to the Eurotherm 3000 Controller with +/-0.1 C accuracy.
Optional	Click picture below-left  to order bubbler or evaporator for CVD Click picture below-right to order Constant temperature control module                                click here to choose a crucible
Overall dimensions	Furnace: 550mm(L) x 380mm(W) x 520mm(H)  3 Bottom Mobile case together: 1800mm(L) x 850mm(W) x 700mm(H)
Warranty	One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control (Optional)	Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use. Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces.
Compliance	CE Certified NRTL or CSA certification is available upon request at extra cost.
	Patten Number： ZL-2011-2-0355777.1
Operation Video
Warning Click here to learn the installation of a gas regulator	The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C The flow rate for gasses should be limited to<200 SCCM for reducing thermal shocks to the tube
Shipping Dimensions	Pallet #1: 48" x 40" x 65" Pallet #2: 48" x 40" x 40" Pallet #3: 48" x 40" x 40" Pallet #4: 48" x 40" x 40"
Total Shipping Weight	1100 lbs