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Compact 5" Split Vacuum Furnace w/ 12" heating zone & Separated Controller (1200C Max) - OTF-1200X-S-5
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Click to enlarge
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In stock
Item Number: OTF1200XS5
Transported by LTL Freight (Truck)
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OTF-1200X-S-5 is a compact and energy-saving split tube furnace with a max. the working temperature of 1200°C (Since 2016.11.08) and All electric parts are UL / MET / CSA certified. The furnace adopts a 5" (130mm) O.D quartz tube with a pair of stainless steel vacuum sealing flanges. The 1/4" barb fitting for the rubber hose connection allows heating samples in the vacuum or flowing gas. The temperature controller is seperarated from the furnace with 30 segments of heating and cooling steps with +/- 1 °C accuracy. The furnace can anneal wafer up to 4 "in diameter.
SPECIFICATIONS:
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Furnace Structure
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- Double-layer steel structure.
- High-purity Al2O3 fibrous insulation with Max. energy saving.
- High-purity alumina coating on refractory ceramics for longer service life.
- This furnace can be modified into many special furnaces ( see the bottom application note)
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Power
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3 KW
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Voltage
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220VAC 50/60Hz
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Max. Temperature
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1200°C (<1 hour)
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Continuous Temperature
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1100°C (continuous)
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Max. Heating Rate
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≤ 20 °C/min
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Heating Zone Length
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- 12 " (300mm), single zone.
- Constant Temperature Zone
- 100 mm length (+/-1ºC ): ( click drawing below for temp profile )
- 140 mm length (+/-2ºC ): ( click drawing below for temp profile )
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Temperature Control
 
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Advanced Temperature Controller (Optional)
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Temperature Accuracy
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+/- 1°C
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Heating Elements
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Fe-Cr-Al Alloy doped by Mo
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Tube Size
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- One pair of SS 304 vacuum flange with double high-temperature silicone O-ring and stainless steel protective shield are Included. (click the pictures left for more details).
- KF25 port is built in the right side flange to connect a vacuum pump.
- The vacuum gauge, inlet valve, and 1/4 thermocouple feed-through are built-in left side flange.
- The vacuum level can reach 10-2torr (by a mechanical pump).
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- Option 1：Water cooling 5" flange with Support Fixture, which allows the furnace to achieve1200°C (Pic 1)
- Option 2: Hinged type flange for easy sample loading( Pic.1- 2)
- Option 3: A second temperature as a monitor can be added with additional cost applied. ( Pic 2)
- Option 4：For working temp < 500oC, and use it inside the glovebox, the furnace can short to 500 mm L ( Pic. 3)
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 pic 1  Pic 2  Pic. 3
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Fitting Ports
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Optional Parts
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- You may need a vacuum valve at the vacuum port click picture left to order ).
- You may click the pictures in below to order a furnace with a vacuum pump and a temperature calibration kit.
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Pressure Measurement / Monitoring
 
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- Standard mechanical vacuum gauge measures within a pressure range of -0.1 to 0.15Mpa is included.
- OPTIONAL: A gas-type independent (above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. Aside from greater measurement precision, this gauge reduces the risks of chamber explosions caused by the incorrect reading of gas pressures due to gas-type dependency.
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Optional Insert-able Thermal-couple
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- A K-type insert-able thermocouple can be inserted through the flange to monitor the temperature inside the tube. Click the picture below to order
- The heating furnace is available for spare and replacement ( click on the right picture below).
- You may order flange support to avoid tube rotating ( click Pic below right )
   .jpg) 
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Dimensions
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- Furnace with Lid Close: 1100 L x 440 D x 460 H, mm
- Furnace with Lid Open: 1100 L x 600 D x 700 H, mm
- Furnace without Tube: 740 L x 440 D x 460 H, mm
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  Click the pic for more details.
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Net Weight of Furnace
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48 Kg
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Shipping Weight & Dimensions
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280 lbs; 48"x40"x48"
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Warranty
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One-year limited warranty with lifetime support (Consumable parts such as processing tubes and o-rings are not covered by the warranty, please order replacements at related products below.) |
Laptop, software & WiFi Control(Optional)
 
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- Laptop, software & WiFi Control (Optional) with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
- Labview Based software (EQ-MTS01) enables the user to edit temperature profiles,
- A wireless remote control provides up to 300 meters of operating range.
- The above features are available upon request at an extra cost (up to $1,000).
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon request at the extra cost
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Application Notes & Warning
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- Tube furnaces with quartz tubes are designed for use under a vacuum and ambient pressure, < 3 psig.
A two-stage pressure regulator for gas cylinder is highly recommended to limit the pressure below 3 psig. Click here to learn the installation of a gas regulator.
- The working temperature under vacuum is limited to 1000°C
- The gas flow rate should be limited to 200 SCCM to maintain the uniform temperature zone.
- How to set up a ceramic tube and vacuum flange for MTI tube furnaces.
- The small tube furnace can also be placed inside a fume hood for venting purpose. ( click picture left to see )
- This furnace can be modified into the vertical, rotation, high-temperature ball mill and dip coating ( click picture below to see detail)
   
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Operation Video
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