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1100ºC PECVD Rotary Furnace with Vacuum Pump - OTF-1200X-S-II-PECVD


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Item Number: OTF-1200X-S-II-PECVD
Transported by LTL Freight (Truck)
OTF-1200X-S-II-PECVD is a 1000ºC Rotatable Two-Zone Plasma-Enhanced Chemical Vapor Deposition (PE-CVD) system. It consists a 300W RF (Ratio Frequency) Plasma Generator & Matching Network, and High-Performance Vacuum Pump. Such a system is an excellent tool for heat treating inorganic compound powders with superior temperature and surface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on sample surface).

SPECIFICATIONS:
System Structure

  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma enhanced processing which significantly reduces processing-temperature. 
  • Gear driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity.
    Note: Gas tank is not included
Two-Zone Rotary Furnace

  • Working temp: 1100ºC Max(<1hrs)., and 1000ºC for continuous heating.
  • Two PID temperature controllers with 30 segments programmable.
  • Input Power: 208 – 240 VAC, single phase at max. 1.5KW.
  • High purity Alumina fibrous insulation for max. energy saving.
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM.
  • Two zones: each zone length 4" (100 mm), total 8" (200 mm) heating zone.
Plasma RF Power Supply
 
 
  • Output Power:           5 -300W adjustable with ± 5% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      100W max.
  • Matching:                  Automatic.
  • Power:                      208-240VAC, Single Phase, 50Hz.
                
Sealing Flanges
    • Standard:  2'' O.D Fused quartz processing tube, please click the pic on the left for details.
    • One pair of 1'' SS sealing flange with rotatable gas connector needle valves and are included for immediate use.
    Sealing Flanges
      
    • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube.
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the foreline or downstream attachments (such as gas, powder and electrical delivery lines).
                      
    Tube Rotation Speed
    • 0 - 5 RPM variable.
    Vacuum Pump & Gauge
     
    • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs.
    • KF25 adapter and stainless steel bellows are connected between pump and tube flange.
    • 10E-2 Torr vacuum can be achieved inside the processing tube.
    • Note: Vacuum Gauge is available at additional cost, please click underline and to order.



    Temperature Control
     
     
    • Two heating zone design with individual temperature controller.
    • Precise PID control of heating, cooling rate and dwell time, 30 programmable segments.
    • Built-in overheating & broken thermocouple protection.
    • Over-temperature protection and alarm allow for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • Two K-type thermocouples (one for each zone).
    • RS485 Communications Port.
    • Optional:  
      • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
    Dimensions & Weight

    • Furnace: 1400mm L x 600mm W x 1240mm H (with lid opened);
    • Net weight: 400 Lbs.
    • Shipping Weight: 500lbs.
    Warranty
    One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
    Volumetric Feeder and Collector Tank (Optional)      pic. 1                      pic.2
    • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating. Please click the pic.1 on the left to order.
    • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details.
    • Note: contact us for customization details.
    Laptop, software & WiFi Control (Optional)
    • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
    • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
    • A wireless remote control provides up to 300 meters operating range.
    • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
    • Note: The software is only compatible with MTI’s Yudian Temperature Controller
    •     



    Compliance
    • CE Certified
    • All electric components ( >24V) are UL / MET / CSA certified
    • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. (pls click marks below to learn details )
                      
    • The tube furnaces with mullite tube are designed for using under vacuum and low pressure < 0.02 Mpa / 0.2 Bars / 3 PSI 
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.  
    • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
    • The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
    • Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely used up to 1300°C

    Operation Insturctions
        
     

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    Notices
    1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor cost.
    3. The prices listed are subject to change without notice.