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1200C Max Dual Sliding Tube Furnace with 50 mm Tube Flanges for TCVD - OTF-1200X-S-50-DFSL

8-10 wks delivery
Item Number: OTF1200XSDFSL50
Transported by LTL Freight (Truck)


Upgrade to Eurotherm Temp Controllers (Dual )
OTF-1200X-S-50-DFSL is a dual slidable furnace on the rail. It is a tool for thermal CVD with 2" ODx55"L Quartz tube & flanges and max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.  Optional motorized sliding, MFC gas delivery, and RF Plasma generator are available to build a flexible TCVD system easily at a low cost.


Furnace Structure

  • Both furnaces are double-layer steel structures with 1200°C max. working temperature
  • Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone
  • One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
  • Vacuum flanges are installed for immediate use.

Power of furnace

  •  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
  •  2.5 KW in total

Max. Temperature

1200°C (<1 hour)

Continuous Temperature


Heating & Cooling Rates

  Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
  7°C/sec (250°C - 350°C);
  4°C/sec (350°C - 500°C);
  3°C/sec (350°C - 550°C);
  2°C/sec (550°C - 650°C);
  1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

200mm( ~8")  for each furnace

Constant Temperature Zone

60 mm (+/-1°C @ 400-1200°C)

Heating Elements

Fe-Cr-Al Alloy doped by Mo

Processing Tube Size

High purity fused quartz tube

Size:  50mm O.D x 44mm I.D x1500 mm Length 
Optional:  S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost

Temperature Controller

  • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without an attendant.
  • Two K-type thermal couples are included. 
  • Optional:  
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • We recommend you order a computer (laptop) from us to avoid software installation problems. For more information please click here

Temperature Accuracy

+/ - 1°C

 Vacuum Flanges

  • Stainless steel vacuum flanges with a vacuum gauge ( click picture bottom left to see details) are installed on both ends of the tube with heavy-duty support. (Pic. 1)
  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost. ( click Pic. 2), and  water cold flange (Pic. 3)
  •           Pic. 1   Pic. 2  Pic. 3
 Sliding Rails / Table
  • Double sliding rail made by Cr-plated steel
  • Sliding length: 1200 mm
  • Two slide-stopping clamps are included for holding the position of the furnaces.

 Vacuum Level 

  • Limited by pump ( pump is not included, click on pictures to order )
    • 10E-5 torr can be achieved via molecular pump
    • 10E-2 torr can be achieved via a mechanical pump.

Optional for upgrade

  • Motorized sliding is available upon request ( please click bottom left picture )- (Pic. 1)
  • 1-9 channel gas mixing and delivery models is available ( click picture 2 in below to order )
  • 100W - 500W  RF plasma generator for plasma enhanced processing is available upon request ( click picture 3 to see detail ). This module allows you build your own Plasma Enhanced Thermal CVD system (Pic. 4)
  • You may need a cold trap to condense the exhaust gas (Pic. 5)
             Pic. 1   Pic. 2    Pic. 3   Pic. 4Pic. 5 


  • Furnace: 340 x 300 x 400 mm
  • Total:1600 x 430 x 500 mm ( furnaces + sliding )

 Net Weight

~ 80 Kg

Shipping Package Size

70" x 45" x 45" (inch)

Shipping Weight

300 lbs


One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).


  • CE Certified
  • NRTL or CSA certification is available at extra cost ($3500.00).

Application Notes

Click here to learn the installation of a gas regulator


  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gear such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

Operation Instructions


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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.