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1500C Six Zone Split Tube Furnace with Flange & Alumina Tube (60 mm O.D.) - OTF-1500X-6Z

Please email for lead time
Item Number: OTF1500XVI
Transported by LTL Freight (Truck)


Upgrade to Eurotherm Temp controller( 3 zone)+15" Laptop+ USB Cable
OTF-1500X-6Z- is a six-zone split tube furnace with alumina tube and vacuum-sealed flange working up to 1500°C. Six 30 segments temperature controllers are installed with S type thermal couples and  +/ - 1°C accuracy. It is an excellent furnace for high-temperature CVD and annealing application

Power Input 22 KW
Working Voltage  AC220+/- 10% VAC three-phase 50/60Hz
( 100 A breaker required)
Working Temperature Max.                1500°C 《 30 minutes
Continuous:      800 -1400°C
Recommend Heating rate 5°C/min.
Processing Tube

Material:  Alumina
Size:   60 O.D x 51 I.D x 1800mm L

Heat Zone Length
  • Six heating zones:     12" +8" + 8" + 8" + 8" + 12" 
  • Total heating zone length:  1422 mm  ( ~ 56")
  • Constant Temperature Zone:   800 mm  +/- 5ºC. ( If set 6 zones at the same temperature, without zone spacer. If you don't need the zone spacer, you shall inform us in advance)
  • The Built-in heating zone space to create a thermal gradient up to 100ºC/ cm
Overall Dimensions 1950 mm L × 660 mmW × 762 mmH
Temperature Controllers

  • 6 digital temperature controllers for controlling each heating zone
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 program of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Laptop & software (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) 
  • Labview-Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
Vacuum Level
  • 10E-2 torr by quality mechanical vacuum pump
  • 10-5 torr by molecular pump

Thermal Block Placement
  • Two thermal blacks are included. Please click the picture below to learn how to place them inside tube
  • You may order flange support to avoid tube rotating ( click Pic below right )
Heating Elements & Thermal couples

  • 48 pcs  1500ºC grade Silicon carbide rod  (14mm Dia. x 150mm heating  x  413mm length)
  • The heating element is consumable, Please click the picture below to order spare and replacement.
  • Six S-type thermocouples (one for each zone).
Net Weight ~ 300 Kg

Application Notes
  • The tube furnaces with mullite tube are designed for use under vacuum and low pressure < 0.02 Mpa
  • Never use graphite crucible and the alumina tube.
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
  • The flow rate for gases should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum pressures may only be safely used up to 1300°for all mullite tube furnaces:
  • Customized long heating zone up to 1200 mm L  with 700 mm uniform temperature zone ( +/- 5°C) , 安定1800mm mullite tube is available upon request; ( click the picture below to see sketch)
Operation Instructions

  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI's One Year Limited Warranty.
  • CE Certified
  • NRTL (UL61010) or CSA certification is available upon request at extra cost.

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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.