Browse Categories

1500ºC Max.Three Zone PECVD Tube Furnace (80 mm OD) with 4 Channel Gas Delivery & Oil-less Vacuum Pump - OTF-1500X-III-PEC4SL

Please email for lead time
Item Number: OTF1500XIIISL80
Transported by LTL Freight (Truck)


Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15" Laptop + USB-to-RS485 Cable
OTF-1500X-III-PEC4SL is three zones 1500ºPE-CVD tube furnace system consists of 300W RF plasma source, 81Dx 2133mm mullite tube furnace with an integrated channel precision mass flow meter with gas mixing tank, and a high-quality oilless vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene or SiC coating.
(item number has been updated from OTF-1500X-80-III-4CV-PE-SL since March 2019)


Three Zone 1500°C Split Tube furnace

  • Max 1500ºC, and for 1400ºcontinuous heating
  • Three programmable precision digital temperature controllers with 30 segments.
  • Three separately controlled Heating Zones: 
    • 200 mm / each  ( included 20 mm spacing )
    • Total zone length:  600 mm  
  • Mullite ceramic tube made in USA, Size: 81 O.D x 73 I.D x 2133 L mm ( click picture left to order spare )
  • Input power: 208 – 240V AC input, single phase at max. 6.6KW.
  • Click Picture below left to see detail specs.
  • Vacuum sealing flanges are included for immediate use.  One end flange has a quartz window so that plasma glowing can be seen through the window ( click picture below right  to see details )

Plasma RF Power Supply
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      200W max.
  • Matching:                   Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                        <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Anti-corrosive Pressure Gauge

  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detail spec.
Oil-less Vacuum Pump Station and Valves

Mass Flowmeters & Gas Mixing Station

  • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. One gas mixing tank is installed on the bottom case with liquid release valve.
    • MFC 1: Gas flow range from 0~100 SCCM
    • MFC 2&3: Control range from 0~200 SCCM  
    • MFC 4: Control range from 0~500 SCCM
  • Gas inlet fitting: four 1/4NPS.
  • Gas outlet fitting: four 1/4NPS.
  • Power: 185-220VAC 50/60Hz
  • 4 stainless steel needle valves are installed on the left side of the bottom case to manually control the mixing of 4 gas types.
  • Four channel gas flows are integrated into one PLC with touch screen panel to control
  • ( optional: constant pressure control module )

Temperature Control
  • Three precision digital temperature controllers to control three heating zone independently
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.

Overall Dimensions
  • Furnace: 865 L x 654 W x 707 H mm 
  • Sliding Rail: dual rail with 1750 mm length
  • Two Adjoined Bottom Mobile Cases: 1200 x 1200 x 1200mm.
  • Net weight: 220 Lbs.
  • Shipping weight: 1200lbs.
One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note:    The software is only compatible with MTI’s Yudian Temperature Controller

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.( please click marks below to learn details )
  • The tube furnaces with mullite tube are designed for using under vacuum and low pressure < 0.02 Mpa / 0.2 Bars / 3 PSI 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.  
  • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
  • The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
  • Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely used up to 1300°

Operation Insturctions

Shipping Weight & Dimensions
  • Total 4 Pallets
  • #1: 1200 lbs, 93"x40"x59"
  • #2: 220 lbs, 48"x40"x45"
  • #3: 285 lbs, 48"x40"x45"
  • #4: 200  lbs, 48"x40"x45"

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab

MTI-VISTEC Cylindrical Cell  Pilot Line

MTI Sponsors the Postdoctoral Awards

MTI and Celgard have successfully reached the settlement under court for the litigation on patent and trademark

Upcoming Shows:

2019 MRS Fall Dec 1 - 6 Boston MA Booth 901

AABC Europe Jan 12 - 16 Wiesbaden Germany

TMS 2020 Feb 23 - 27 San Diego CA Booth 301

APS March Meeting March 2 - 6 Denver CO

Recent Attended Shows:
236th ECS Meeting Oct 13 - 17 Atlanta GA Booth 200

MS&T 2019 Sep 29 - Oct 3 Portland OR Booth 614

ICT/ACT 2019 Jun 30 - July 4 Gyeongju South Korea

Click here to see our past conferences


1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.