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1200C Dual Sliding Tube Furnace with 2” Tube & Flanges for PECVD - OTF1200XSDFPESL


8-10 wks delivery
Item Number: OTF1200XSDFPESL
Transported by LTL Freight (Truck)
OTF1200XSDFPESL is a dual slidable PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system. It is a tool for PECVD with 2" ODx55"L Quartz tube & flanges and a max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min. 

SPECIFICATIONS

Furnace Structure

  • Both furnaces are double-layer steel structures with 1200°C max. working temperature.
  • Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone.
  • One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
  • Vacuum flanges are installed for immediate use.

Power of furnace

  •  AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
  •  2.5 KW in total

Max. Temperature

  • 1200°C (<1 hour)

Continuous Temperature

  • 1100°C

Heating & Cooling Rates


  Heating Rate:
 15°C/sec (RT - 150°C);
 10°C/sec (150°C - 250°C);
  7°C/sec (250°C - 350°C);
  4°C/sec (350°C - 500°C);
  3°C/sec (350°C - 550°C);
  2°C/sec (550°C - 650°C);
  1°C/sec (650°C - 800°C);
 
0.5°C/sec (800°C - 1000°C);
Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);

1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
Note:
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.

Heating Zone Length

  • 200mm( ~8")  for each furnace

Constant Temperature Zone

  • 60 mm (+/-1°C @ 400-1200°C)

Plasma RF Generator

  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:      200W max.
  • Matching:                 Automatic
  • RF Output Port:        50 Ω, N-type, female
  • Noise:                      <50 dB. 
  • Power:                     208-240VAC, 50/60Hz
  • Cooling:                   Air cooling.

Processing Tube Size

  • High purity fused quartz tube
  • Size:  50mm O.D x 44mm I.D x1500 mm Length 
  • Optional:  S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost.

Temperature Controller
 
 

  • Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
  • Built-in over-temperature alarm and protection allow for operation without an attendant.
  • Two K-type thermal couples are included
  • Temperature Accuracy: +/ - 1°C
  • Optional:  
    • The furnace may be operated by a PC by installing a control module. Please order an MTS-01 control module at extra cost. 
    • We recommend you order a computer (laptop) from us to avoid software installation problems.

 Vacuum Flanges

  • Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost ( Pic.1) and  water cold flange (Pic. 2).
  •   Pic. 1  Pic. 2
 Sliding Rails / Table
  • Double sliding rail made of Cr-plated steel
  • Sliding length: 1200 mm
  • Two slide-stopping clamps are included for holding the position of the furnaces.

Optional

  • Motorized sliding is available upon request (Pic. 1)
  • 1-9 channel gas mixing and delivery models are available (Pic.2)
  • Water Chiller for the lab equipment that needs water cooling. (Pic.3)
  • Heavy duty double stage rotary vane vacuum pump to get a high vacuum level (Pic.4)
              Pic. 1    Pic. 2     Pic. 3   Pic. 4 

 Dimensions

             
             780mm(L) x 600mm(W) x 710mm(H)

Warranty

  • One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Compliance

  • CE Certified
  • NRTL or CSA certification is available at extra cost ($3500.00 for furnace ONLY).
  • Plasma Generator is CE ONLY

Application Notes

Click here to learn the installation of a gas regulator

Warning

  • Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gear such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!

Operation Video

            

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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.