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1200C Dual Sliding Tube Furnace with 2” Tube & Flanges for PECVD - OTF1200XSDFPESL
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8-10 wks delivery
Item Number: OTF1200XSDFPESL
Transported by LTL Freight (Truck)
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OTF1200XSDFPESL is a dual slidable PECVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system. It is a tool for PECVD with 2" ODx55"L Quartz tube & flanges and a max 1200°C achievable working temperature. Two 2" tube furnaces can be slide on the sliding rail to find positions for source materials thermal evaporation/sublimation and film deposition. Sliding the furnace from one side to another can achieve max. heating and cooling rates up to 100°C/min.
SPECIFICATIONS
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Furnace Structure
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- Both furnaces are double-layer steel structures with 1200°C max. working temperature.
- Each Furnace has a 200mm heating zone and a 60 mm long constant temperature zone.
- One pair of sliding rails are installed on the bottom of the furnace, which allows the furnace to be manually moved from side to side with a max sliding distance 400 mm.
- Vacuum flanges are installed for immediate use.
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Power of furnace
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- AC 208-240V Single Phase, 50/60 Hz, 20 A air breaker required
- 2.5 KW in total
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Max. Temperature
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Continuous Temperature
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Heating & Cooling Rates
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Heating Rate:
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
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Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
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Note:
The max heating and cooling rate is achieved by pre-heat one side of the processing tube to the target temperature and then slide the furnace to the other side. You may choose to place the sample in the pre-heat area or not.
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Heating Zone Length
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- 200mm( ~8") for each furnace
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Constant Temperature Zone
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- 60 mm (+/-1°C @ 400-1200°C)
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Plasma RF Generator
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- Output Power: 5 -300W adjustable with ± 1% stability
- RF frequency: 13.56 MHz ±0.005% stability
- Reflection Power: 200W max.
- Matching: Automatic
- RF Output Port: 50 Ω, N-type, female
- Noise: <50 dB.
- Power: 208-240VAC, 50/60Hz
- Cooling: Air cooling.
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Processing Tube Size
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- High purity fused quartz tube
- Size: 50mm O.D x 44mm I.D x1500 mm Length
- Optional: S310 high temp alloy tube is available for higher pressure ( 100 PSI ) at the extra cost.
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Temperature Controller
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- Two furnaces are PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
- Built-in over-temperature alarm and protection allow for operation without an attendant.
- Two K-type thermal couples are included
- Temperature Accuracy： +/ - 1°C
- Optional:
- The furnace may be operated by a PC by installing a control module. Please order an MTS-01 control module at extra cost.
- We recommend you order a computer (laptop) from us to avoid software installation problems.
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Vacuum Flanges
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- Optional flange with a KF25 vacuum port and digital vacuum gauge is available at extra cost ( Pic.1) and water cold flange (Pic. 2).
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 Pic. 1  Pic. 2
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Sliding Rails / Table |
- Double sliding rail made of Cr-plated steel
- Sliding length: 1200 mm
- Two slide-stopping clamps are included for holding the position of the furnaces.
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Optional
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- Motorized sliding is available upon request (Pic. 1)
- 1-9 channel gas mixing and delivery models are available (Pic.2)
- Water Chiller for the lab equipment that needs water cooling. (Pic.3)
- Heavy duty double stage rotary vane vacuum pump to get a high vacuum level (Pic.4)
 Pic. 1  Pic. 2  Pic. 3  Pic. 4 |
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Dimensions
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 780mm(L) x 600mm(W) x 710mm(H)
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Warranty
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- One-year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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- CE Certified
- NRTL or CSA certification is available at extra cost ($3500.00 for furnace ONLY).
- Plasma Generator is CE ONLY
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Application Notes
Click here to learn the installation of a gas regulator
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Warning
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- Fast sample cooling can be achieved by sliding the heating chamber away. Please wear protective gear such as heat resistant suit & gloves if you intend to do so. DO NOT TOUCH THE TUBE SURFACE WHEN IT IS HOT!
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Operation Video
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