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Small Batch (12 pcs 6" Wafer) PECVD System ( CCP type ) for Pilot Test - PECVD-8-16

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Item Number: PECVD-8-12
Transported by LTL Freight (Truck)
PECVD-8-16 is a CCP type PECVD system for a small batch of 12 pcs 6" wafer.  The system consists of an 8"ID quartz tube furnace up to 1100°C, a batch type graphite boat for 12 wafers, 1000W plasma generator, and a 4-channel programmable gas delivery system. It is an excellent tool for a pilot test of thin-film research of solar cell and 2D materials.

SPECIFICATIONS
Furnace structure


  • High purity alumina fibrous insulation for max energy saving
  • Three heating zones to achieve 600 mm constant temperature zone up to 1100ºC.
  • 8.5" OD 5 8" ID quartz tube with vacuum-sealed flanges 
  • One sliding rail driven by a DC motor facilitates loading of the graphite boat and samples
  • High purity graphite boat can carry up to 12 circular or rectangular 6" wafers
  • 1000W RF (13.5MHz) power supply is included for plasma generation.
  • Four-channel gas mixing and delivery system is included for deposition of precursors
  •  A vacuum pump (oil or dry type) is available upon request.
Power
  • 208-240 VAC, single phase,  50/60 Hz
  • 9 kW
  • Power cord is included without a plug. MTI may help customer add a power plug at an extra cost. 
Quartz tube & flanges

  • 8.5" O.D x 8.2" I.D x 51" Length
  • One quartz tube is included, and the spare tube is available as an option ( click picture left to order )
  • SS304 flanges are included with the KF40 vacuum port & valve and  gas inlet & outlet are included
  • Built-in dual sliding rails and DC motor drives the flange and sample boat in and out
Graphite Boat

  • Graphite boat made of high purity graphite ( Japan) with RF electrodes
  • 12 slots ( 4x3 ) slot to carry 6" x6" x0.5 mm  or 6" diameter wafers
  • Customized graphite boat ( 4x4 or 5 x4 ) is available upon request at the extra cost
Furnace

  • Heating element:  NiCrAl Resistance Wire
  • Heating Zone:  Three heating zone ( 300 mm + 300 mm + 300mm )
  • Constant temperature zone:            600 mm within +/- 2ºC ( If 3 zone at the same temp.)
  • Working temperature:                      400 -1100°C
  • Max. heating/cooling rate:               10°C/min     
  • Click the picture left to see details of furnace specs.
Temperature controllers
  • Three Eurotherm 3000 temperature controllers with 24 segments programmable
  • Three K type thermal couples are installed.
  • Temperature accuracy: +/- 0.1°C
  • Software and PC interface module is  included
RF Plasma Generator
  • Output Power:            20  -1000W adjustable with ± 1% stability
  • RF frequency:            13.56 MHz ±0.005% stability
  • Matching:                   Automatic with variable air capacitor
  • Cooling:                     Air cooling
  • Noise:                        <50 dB
  • Power:                       110 - 240VAC, 50/60Hz
Gas Delivery System
  • Four MFCs are built in a movable cart with accuracy: ±1.5%FS and repeatability: ±0.2%FS
    • Controller 1: 0~100 SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM
  • Touch screen panel to gas delivery parameters
  •  RS485 port is installed for remote control by a PC
  • Customized software is available to match receipts upon request at an extra cost.
  • Range of each MFCs are interchangeable at an extra cost. 
Vacuum Pump & Gauge
  • An anti-corrosion vacuum gauge is included up to 10-5 torr
  • A vacuum pump is required, but not included. Please click the link pics to order
  •  Vacuum gauge  Oil pump     Dry scroll pump
Product dimension
  Click the picture to see the detail.
Net weight ~ 500 Kg
Shipping dimension 70" x 70" x 65"
Shipping weight ~600 Kg
Warranty One year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user
Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request
Schematic Diagram and 
Demo Video
  •        

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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.