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1200C Max. PECVD Split Tube Furnace (2" - 3.14" OD) w/ 4 Channels Gas Delivery & Vacuum Pump - OTF-1200X-PEC4LV


Transported by LTL Freight (Truck)

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OTF-1200X-PEC4LV is acompact PE-CVD (Plasma Enhanced Chemical Vapor Deposition) tube furnace system, which consists of 300W RF plasma source, 2"  or 3.14" O.D optional split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high-quality mechanical pump.   The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nanowire from a gas state (vapor) to a solid-state, and benefits:
  • Lower temperature processing compared to conventional CVD. 
  • Film stress can be controlled by high/low frequency mixing techniques. 
  • Control over stoichiometry via process conditions.
  • Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
Specifications:
  Split Tube furnace
 
  • 1200oC Max. working temperature for < 60 minutes
  • 1100oC Max for continuous heating
  • 30 segments programmable precision digital temperature controller
  • 440 mm length single heating zone and 150 mm length constant temperate zone
  • High purity quartz tube optional from ( click the optional bar to choose )
    One pair of the vacuum-sealed flange with valves
    • 2"OD x 1.7"ID x  48" Length 
    • 3.14"OD x 2.83"ID x 48'' Length
  • Input power: 208 – 240V AC input, a single phase at max. 4KW
Plasma RF Power Supply
 
     
  • Output Power:          5 -300W adjustable with ± 1% stability
  • RF frequency:          13.56 MHz ±0.005% stability
  • Reflection Power:     200W max.
  • Matching:                Automatic
  • RF Output Port:       50 Ω, N-type, female
  • Noise:                    <50 dB. 
  • Cooling:                  Air cooling.
  • Power:                   208-240VAC, 50/60Hz
  • Note:                      This RF power supply can accept 50 - 80 mm Max. quartz tube  by changing flange
Anti-corrosive Pressure Gauge
  • 3.8x10-5 to 1125 Torr measurement range
  • Anti-corrosive, gas-type independent 
  • High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
  • Fast atmospheric detection eliminates waiting time and shortens the process cycle
  • Easy to exchange plug & play sensor element
  • Click the picture to view detailed spec
  Vacuum Pump and valve
 
  • Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM -240 L/m) with Two-Stage Exhaust System installed in the bottom case with max. vacuum pressure 10-2 torr.
  •  KFD25 adapter and stainless steel pipe are connected between pump and tube flange with precision ball valve
  •  Digital vacuum pressure gauge and display are installed with the furnace
Option: For precise control of the vacuum pressure, we recommend you choose our turn-key solution EQ-VPC-MV. This is a vacuum pressure regulating system with a motorized valve and gauge. 
Optional Oilless Pump
Please order the oilless pump for zero contamination:
Mass Flowmeter
    
 EQ-GSL-LCD  
   
  • 4-channeled Gas Mixing
  • Made of 316 stainless steel valve
  • Gas mixing tank: Φ80X120mm  
  • 600mm(L) x 745mm(W) x 700mm(H)
  • 6" color touch screen control panel to make parameter setting at easy.
  • Touchscreen Control and PC remote switchable.
  • 23W per channel
  •  AC 220V/50Hz Single phase
Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  •             
Optional
                               click here to choose a crucible
Overall dimensions
  • Furnace: 550mm(L) x 380mm(W) x 520mm(H) 
  • 3 Bottom Mobile case together: 1800mm(L) x 850mm(W) x 700mm(H)
Warranty 
One year limited warranty with lift time support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables users to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces.
  •     


Compliance
  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.
Patten Number: ZL-2011-2-0355777.1 
Operation Video

        
Warning

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars / 3 psi
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM for reducing thermal shocks to the tube
Shipping Dimensions
  • Pallet #1: 48" x 40" x 65"
  • Pallet #2: 48" x 40" x 40"
  • Pallet #3: 48" x 40" x 40"
  • Pallet #4: 48" x 40" x 40"
Total Shipping Weight 1100 lbs

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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.