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ALD & PECVD Combination Tube Furnace System - OTF-1200X-ALD
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Please email for lead time
Item Number: OTF-1200X-ALD
Transported by LTL Freight (Truck)
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OTF-1200X-ALD is a dual zone tube furnace combining ALD ( Atomic Layer Deposition ) and PECVD ( plasma enhanced chemical vapor deposition )
for preparing new generation thin film
- Two 10 ms ALD valves for ultra-thin film deposition
- Lower temperature processing is required compared to the conventional CVD
- High heating & cooling rate using sliding furnace
- Dual heating zone to create thermal gradient up to 500ºC
- 1100ºC Max. working temperature in the tube furnace
- 1100ºC Max. working temperature in pre-heater for heating vapor phase or evaporating solid materials
- Rapid cooling & Heating for growing 2D materials
SPECIFICATIONS:
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Control Pannel
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- All parameters of Vapor , ALD and Plasma are controlled by PLC via a 6" touch screen pannel
- Please click picture below to see control inter face
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ALD valve
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- Two ALD valves with pulse controller (min 10 ms duration )
- 6" touch screen control pannel
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Liquid-Vapor Generator
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- Automatic liquid vapor generator is included and connect to ALD valve
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Dual Zone Split Tube furnace
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- Max 1100ºC for continuous heating
- Two programmable precision digital temperature controllers with 30 segments.
- Two separate controlled Heating Zones
- 200mm length for each heating zone
- 400mm total in heating length
- 250mm constant central temperature heating area if both zones were heated at the same temperature
- 500ºC max temperature difference between two zones with thermal blocks in between
- Input power: 208 – 240V AC input, single phase at max. 4KW
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Plasma RF Power Supply
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- Output Power: 5 -500W adjustable with ± 1% stability.
- RF frequency: 13.56 MHz ±0.005% stability.
- Reflection Power: 200W max.
- Matching: Automatic
- RF Output Port: 50 Ω, N-type, female
- Noise: <50 dB.
- Cooling: Air cooling.
- Power: 208-240VAC, Single Phase, 50/60Hz
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Pre-heating furnace
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- Small tube furnace with 200mm length single heating zone
- Max. temperature: 1100ºC
- 30 segment programmable temperature control
- Vapor go through the heater first before get in RF Plasma generator.
- Can put solid material in the heater for evaporation and mixing with vapor phase.
- Quartz Tube: 50mm OD x 44mm ID x 2200 mm L ( 80mm OD tube is available at extra cost）
- Vacuum flange: included
 
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detail spec.
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Oil-less Vacuum Pump Station and Valves
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Sliding mechanism
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- Sliding rail and screw are built in the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.
- Sliding speed is adjustable from 0-70 mm/s
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Heating & Cooling Rates
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RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here)
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In order to achieve Max.heating rate, the user must preheat furnace to desired temperature , then slide the furnace to the sample zone of the tube
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In order to achieve the Max. cooling rate, push the heated furnace from hot zone to cold zone
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Heating Rate:
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
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Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
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Optional
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- Two - Four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control gas flow rate automatically with the system. Please click the picture below left to choose one at your budget.
- Click picture below - left to order bubbler or evaporator for CVD, and below right for Constant temperature control module
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Overall Dimensions
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Warranty
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One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Laptop, software & WiFi Control (Optional)
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Compliance
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- Built-in Pfeiffer's pump is ELT Certification
- CE Certified
- All electric components ( >24V) are UL / MET / CSA certified
- The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. （ please click marks below to learn details )
 
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- Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- MTI reserves the right to modify its PE-CVD design at any time without notice but promises quality in future designs meet and exceed the specifications above.
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Operation Insturctions
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