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1200C Max Two-Zone PECVD Tube Furnace (50 mm OD) with Pre-Heater and Auto-Sliding - OTF-1200X-II-50-PEMSL
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Please email for lead time
Item Number: OTF-1200X-II-50-PEMSL
Transported by LTL Freight (Truck)
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OTF-1200X-II-50-PEMSL is a dual-zone PE-CVD tube furnace system which consists of 300W RF plasma source, speed controlled slidable mechanism, a pre-heater for sublimating the solid material and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire and for CVD coating of a wide range of material with the following benefits:
- Lower temperature processing is required compared to the conventional CVD
- High heating & cooling rate using a sliding furnace
- Dual heating zone to create a thermal gradient up to 500ºC
- 1100ºC Max. the working temperature in the tube furnace
- 1100ºC Max. the working temperature in pre-heater for heating vapor phase or evaporating solid materials
- Rapid cooling & Heating for growing 2D materials
SPECIFICATIONS:
Dual Zone Split Tube furnace
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- Max 1100ºC for continuous heating
- Two programmable precision digital temperature controllers with 30 segments.
- Two separate controlled Heating Zones
- 200mm length for each heating zone
- 400mm total in heating length
- 250mm constant central temperature heating area if both zones were heated at the same temperature
- 500ºC max temperature difference between two zones with thermal blocks in between
- Input power: 208 – 240V AC input, a single phase at max. 4KW
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Plasma RF Power Supply
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- Output Power: 5 -300W adjustable with ± 1% stability.
- RF frequency: 13.56 MHz ±0.005% stability.
- Reflection Power: 200W max.
- Matching: Automatic
- RF Output Port: 50 Ω, N-type, female
- Noise: <50 dB.
- Cooling: Air cooling.
- Power: 208-240VAC, Single Phase, 50/60Hz
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Pre-heating furnace
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- Small tube furnace with 200mm length single heating zone
- Max. temperature: 1100ºC
- 30 segment programmable temperature control
- The vapor goes through the heater first before getting in the RF Plasma generator.
- It can put solid material in the heater for evaporation and mixing with the vapor phase.
- Quartz Tube: 50mm OD x 44mm ID x 2200 mm L ( 80mm OD tube is available at extra cost）
- Vacuum flange: included
 
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at the atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens the process cycle
- Easy to exchange plug & play sensor element
- Click the picture to view detailed spec.
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Vacuum Pump Station and Valves
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Sliding mechanism
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- Sliding rail and screws are built into the bottom furnace, which can move from one side to another as a program to achieve faster heating or cooling.
- Sliding speed is adjustable from 0-70 mm/s
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Heating & Cooling Rates
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RS485 port and software are installed and allow remote control temperature profile by PC (not included, customer can order one from here)
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In order to achieve Max. heating rate, the user must preheat the furnace to the desired temperature, then slide the furnace to the sample zone of the tube
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In order to achieve the Max. cooling rate, push the heated furnace from the hot zone to the cold zone
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Heating Rate:
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
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Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
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Optional
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- Two - Four precision mass flow meters (0.02% accuracy) with digital displays are available as options, which can replace the bottom case to control the gas flow rate automatically with the system. Please click the picture below left to choose one for your budget.
- Click the picture below - left to order bubbler or evaporator for CVD, and below right for Constant temperature control module
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Overall Dimensions
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Warranty
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One-year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Laptop & software (Optional)
 
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- Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30-day free trial) for immediate use.
- Labview-Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, and record and plot data for MTI furnaces.
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Compliance
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- CE Certified
- NRTL (UL61010) or CSA certification is available upon request at extra cost.
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bars / 3 psi
- Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure. Click here to learn the installation of a gas regulator.
- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Vacuum pressures may only be safely used up to 1000°C
- Click here to learn How to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
- MTI reserves the right to modify its PE-CVD design at any time without notice but promises quality in future designs that meet and exceed the specifications above.
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Operation Instructions
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