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Compact Spin Coater (8000 rpm, 4" wafer Max.) w/ 3 Vacuum Chucks & Vacuum Pump - VTC-100A


Sale Price: Starting at USD$3,598.00
If you are international, please click this.
Transported by LTL Freight (Truck)

Product Options

power supply:
VTC-100A is a compact spin coater with vacuum chucks designed for easy and quick coating via sol-gel for wafers up to 4". The spinning speed is variable from 500-8000 rpm with two programmable segments. The package comes included with complete accessories for immediate use.  

SPECIFICATIONS:

Structure
                   
  • Aluminum casting case to keep spinning stably
  • The liquid disk made of Polypropylene (PP) to resist most of the corrosive solutions
  • Drainage outlet and vacuum pump connector are on the back panel
  • One filter is included in the standard package. It is used to connect the coater for preventing wastewater flowing into the pump
  • One oil-less vacuum pump is included in the standard package, please click here for specification details.

Chamber  & Vacuum Chuck 


  • Chamber Diameter: 145 mm
  • 3 sets of PP anti-corrosive vacuum chucks with chuck o-ring come in different sizes (1'', 2'' and 4'')
  • 1 piece of adhesive tape (6'' W x 24'' L) is included  for coating irregularly shaped substrates (e.g. Place the irregular substrate on the adhesive tape, then the vacuum chuck will hold the tape by suction)
  • Mini suction cups are available for the small wafer with less 1" Dia. or substrate with regular  ( 5x5, or 10x10mm) or irregular shape. Please click here to order. at extra cost. ( see picture below right )
                           (Optional; click pic to see demo video)
Vacuum Pump
   
Spin Speed & Time 

  • Digital control panel with TWO programmable segments for different spin times and speeds
  • Spinning speed: 500 - 8000 RPM  
  • Spinning Time: 1 - 60s
Liquid Injecting

  • 20mL syringe is used to contain the coating material
  • The syringe holder height can be adjusted and rotated freely along the support rod
 - Pic 1   - Pic 2     
Optional
  • Option 1: PE Heating cover with a digital temperature controller up to 120°C(<10 minutes) is available upon request at extra cost. This is a short drying process (usually takes several seconds or Max.10 minutes) which can dry and solidify the coating and remove the residual solvent after the coating process is completed. Click demo video & picture below for detail. 
  • Option 2: PTFE Heating cover + PTFE vacuum chuck set is capable of drying temperature up to 200°C(< 5 minutes). Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature. Please click PTFE Heating cover and chuck set to learn. 
  • Option 3: UV lighting Cover with the controller for drying polymer film quickly (New)
  •         P1       P2    P3    ( video for heatable cover)
Input Power 110VAC or 220VAC please select the voltage in the options bar (10A fuse)
Motor Power 24V DC motor with 150W Max. 
Product Dimensions

13''(L) x 10''(W) x 8.5''(H)
Net Weight 15 kg (33 lbs)
Compliance

  • CE certificated only
  • If you need NRTL certification, please order  VTC-100PA ( click pic below )
     
Warranty 
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty

Operation Video


            ( video for heatable cover)

Application Notes
                         
Warnings
  • Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
  • Turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions 40"(L) x 28"(W) x 24"(H)
Shipping Weight 85 lbs

STANDARD PACKAGE:
Item # Description Qty
1 VTC-100A Desktop Spin Coater 1
2 4" Vacuum Chuck (pre-installed on the machine) 1
3 2" Vacuum Chuck 1
4 1" Vacuum Chuck 1
5 Plastic Glass Cover for operation safety (pre-installed on the machine) 1
6 20mL Syringe for dropping coating solvent on the plate 1
7 Hose for connecting the vacuum pump 1
8 Drain Hose for water outlet 1
9 Oil-less vacuum pump, AC 110V or 220V version with Filter installed on the pump 
(connect to vacuum pipe to keep water from flowing into the pump) 
1
10 Blue Adhesive Tape (6" W x 24" L)
1
Optional Parts
Option Chuck O-ring For VTC200 OR VTC100 Option

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.