Size |
Can fit into MTI furnaces |
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1" |
OTF-1200X-S50 tube furnace (2" tube furnace) |
 1" wafer with a quartz boat |
Mechanical Drawing |
 1" wafer with quartz boat can be placed into 2" tube |
 Place 1" wafer in the center of the furnace |
2" |
OTF1200-3 tube furnace (3" tube furnace) |
 2" wafer with a quartz boat |
 2" Quartz boat cross-section drawing (mm) - Length 180 mm
|
 2" wafer with quartz boat can be placed into 3" tube |
 Place 2" wafer in center of the furnace |
3" |
OTF1200-4 tube furnace |
 3" wafer with a quartz boat |

3" Quartz boat cross-section drawing (mm) - length 180 mm |
 3" wafer with quartz boat can be placed into 4" tube |
 Place 3" wafer in center of the furnace
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4" |
OTF1200X5L tube furnace |
 4" wafer with a quartz boat |
 4" Quartz boat cross-section drawing (mm) - length 180 mm |
 4" wafer with quartz boat can be placed into 5" tube |
 Place 4" wafer in center of the furnace |
4" x 4" |
OTF-1200X-5L, VBF-1200X-H8, OTF-1100X-8.5 tube furnaces |
 4" wafer with a quartz boat |
|
4" x 4" Square wafer with quartz boat can be placed into 8" tube |
 Place 4" wafer in center of the furnace |
6" |
GSL1100X-8.5-S-UL tube furnace, GSL1100X-8.5-III tube furnace, Compact Vacuum Chamber Furnace EQ-VBF-1200X |
 The dimension of 6" quartz boat |
 6" Quartz boat cross-section drawing (mm) - length 190 mm |
 6" wafer with quartz boat can be placed into 7" tube |
 The 6" quart boat can fit in VBF1200 Muffle Furnace |
8" |
GSL1100X-11-III tube furnace |
 The dimension of 8" quartz boat |
 8" Quartz boat cross-section drawing (mm) - length 173 mm |
 8" wafer with quartz boat can be placed into 8.5" tube |
 Place 8" wafer in center of the furnace |
12" |
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 The dimension of 12" quartz boat |
12" Quartz boat cross-section drawing (mm) - length 172 mm
|
 12" wafer with quartz boat can be placed into 15" tube
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 Place 12" wafer in center of the furnace |