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Quartz Boat for Diffusion of Wafer Processing (1"- 12" dia , 25/boat) with different size available - EQ-QB-Series


Sale Price: Starting at USD$249.00
If you are international, please click this.

Product Options

Size:
Features:
  • Wafer boats are made of ultra-high purity quart (4N purity) for diffusion, oxidation and annealing up to 1200oC.
  • Each boat can only carry one size wafers up to 25 pieces from 1" to 12" diameter by 0.5 mm thick seperately. 
  • Please choose the coorect size of wafer from the product option bar. 

Size Can fit into MTI furnaces
1" OTF-1200X-S50 tube furnace 
(2" tube furnace)

1" wafer with a quartz boat
 
Mechanical Drawing

1" wafer with quartz boat
can be placed into 2" tube

Place 1" wafer in the center of the furnace
2" OTF1200-3 tube furnace 
(3" tube furnace)

2" wafer with a quartz boat

2" Quartz boat cross-section drawing (mm) - Length 180 mm

2" wafer with quartz boat
can be placed into 3" tube

Place 2" wafer in center of the furnace
3" OTF1200-4 tube furnace
3" wafer with a quartz boat


3" Quartz boat cross-section drawing (mm) - length 180 mm

3" wafer with quartz boat can be placed into 4" tube

Place 3" wafer in center of the furnace
4" OTF1200X5L tube furnace
4" wafer with a quartz boat

4" Quartz boat cross-section drawing (mm) - length 180 mm

4" wafer with quartz boat can be placed into 5" tube

Place 4" wafer in center of the furnace
4" 
x
4"
OTF-1200X-5L
VBF-1200X-H8
OTF-1100X-8.5
tube furnaces


4" wafer with a quartz boat
4" x 4" Square wafer with quartz boat can be placed into 8" tube
Place 4" wafer in center of the furnace
6" GSL1100X-8.5-S-UL tube furnace
GSL1100X-8.5-III tube furnace,

Compact Vacuum Chamber Furnace EQ-VBF-1200X

The dimension of 6" quartz boat

6" Quartz boat cross-section drawing (mm) - length 190 mm

6" wafer with quartz boat can be placed into 7" tube

The 6" quart boat can fit in VBF1200 Muffle Furnace
8" GSL1100X-11-III tube furnace
The dimension of 8" quartz boat

8" Quartz boat cross-section drawing (mm) - length 173 mm

8" wafer with quartz boat can be placed into 8.5" tube

Place 8" wafer in center of the furnace
12"
OTF-1100X-III

The dimension of 12" quartz boat
 
12" Quartz boat cross-section drawing (mm) - length 172 mm

12" wafer with quartz boat can be placed into 15" tube

Place 12" wafer in center of the furnace

Inspect your delivery:
Please check the package for damages before accepting delivery.
Should damages found, please keep all packaging materials, take pictures, and report immediately to carrier/MTI.

No Warranty:
Kindly note this item is a consumable part, and not covered by warranty. Make sure to inspect for defect(s) thoroughly before use. 

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Quartz Rod (20" L) - EQ-FLG-QR
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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.