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SrTiO3 Substrate with Step Surface & Ti terminated (100) 10x10x0.5mm, 1 SP

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Item Number: STOa101005S1StepUS

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50 to 99USD$236.55
Step STO substrate is a atomically smooth SrTiO3 (100) with steps one unit cell in height was obtained by treating the crystal surface with a pH-controlled NH4F-HF solution. The homoepitaxy of SrTiO3 film on the crystal surface proceeds in a perfect layer-by-layer mode as verified by reflection high-energy electron diffraction and atomic force microscopy. Ion scattering spectroscopy revealed that the TiO2 atomic plane terminated the as-treated clean surface and that the terminating atomic layer could be tuned to the SrO atomic plane by homooepitaxial growth. This technology provides a well-defined substrate surface for atomically regulated epitaxial growth of such perovskite oxide films .
For more information on Step substrate, please refer to the article  at

Surface of SrTiO3 substrate after Step treatment (AFM)

Surface of SrTiO3 substrate before Step treatment (AFM)
Typical AFM picture of step STO substrate
 Substrate Specifications
  • Size:                          10x10x 0.5mm  +/-0.05mm
  • Orientation:                 0.1º miscut from  (100)  ( +/- 0.1º  from Y and X direction )
  • Polish:                        One  sides  EPI polished by CMP tecnology with less sub-surface lattice damage
  • Surface Termination:    TiO2 layer    ( via special etching)
  • Surface finish (RMS or Ra): <5A


Typical Physical Properties

Crystal Structure

Cubic, a=3.905Å

Growth Method



5.175 g/cm3

Melt Point

2080 oC


6 ( Mohn)

Thermal expansion

10.4 (x10-6/ oC)

Dielectric Constant

~ 300

Loss Tangent at 10 GHz

~5x10-4 @ 300K , ~3 x10-4 @77K

Color and Appearance

Transparent (sometimes slightly brown based on annealing condition). No twins.

Chemical Stability

Insoluble in water

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