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Silicon-on-Sapphire (11-02, R Plane), 5mm x 5mm x 0.46 mm, 2sp, Film: 0.5um thick
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In stock
Item Number: FmSOS0505046S2FT05US
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Silicon EPI Layer:
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Silicon Orientation: (100)
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Type, Dopant: Intrinsic type, undoped
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Silicon Thickness: 0.5 um +/-10%
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Resistivity: > 100 ohm.cm
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Micro-particle density ( for particles > 2 um) < 2/cm^2
Sapphire Wafer:
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R plane -- (1-102) with single flat
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Wafer size: 5x5 x 0.46 mm thickness
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Front surface: Epi-polished (Ra < 4 nm)
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Back surface: Optical grade polish
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TTV < 15 um, Bow < 20 um, Warp < 20 um, Flatness (TIR) < 12 um
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