|
|
Home Page
Single Zone Tube Furnace (80 mm Dia, 1200C Max) with 3 Channel Gas Mixer, Vacuum Pump, and Anti-Corrosive Vacuum Gauge - OTF-1200X-80-F3LV
|
|
In stock
Item Number: OTF1200XF3LV80
Personalization
Upgrade to Eurotherm 3000 series
|
OTF-1200X-80-F3LV is a CE certified spiltable single zone tube furnace with 80mm diameter quartz tube, mechanical vacuum pump and three channel gas flowing system. It can achieve a maximum vacuum up to 10-2 torr and mix 1-3 types of gases for CVD or diffusion. This furnace system also includes an anti-corrosive Pirani Capacitance Diaphragm Gauge to enable vacuum measurements with aggressive gases.
SPECIFICATIONS
| Furnace Construction |
- Double layer steel casing with air cooling
- Built-in thermostat automatically runs the cooling system when the case temp. > 55°C
|
|
Power Consumption
|
2.5 KW
|
|
Input Voltage
|
AC 208-240V Single Phase, 50 or 60 Hz
|
|
Maximum Temperature
|
1200 °C
|
|
Continuous workingTemperature
|
1100 °C
|
|
Maximum Heating Rate
|
<= 20 oC /min
|
|
Heating Zone Length
|
400 mm
|
|
Constant Temperature Zone
|
150mm (+/-1°C)
|
|
Temperature Accuracy
|
+/- 1°C
|
| Heating Elements |
Fe-Cr-Al Alloy doped by Mo |
|
Temperature Controllers
|
- PID automatic control via SCR (Silicon Controlled Rectifier) power control with phase angle fired, current limiting resistor.
- 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
- Please click here to learn why SCR is more accurate than SSC (Solid state relay).
- Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over temperature protection and alarm allows for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 Communications Port.
- Advanced Temperature Control (Optional)
- MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for the detail information about the MTS02-Y software kit.
- You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB) and a software CD. Click the pic below to view the full spec of Eurotherm 3504 temperature controller.
   
|
|
Tube Size and Materials
|
Quartz tube: OD: 80mm x ID: 75 mm x Length: 1000 mm
|
Digital Vacuum Gauge 
|
- Corrosion-proof Capacitance Diaphragm Gauge with ceramic coated sensor head specially designed for vacuum measurements with presence of corrosive gases
- Gauge is installed on the vacuum flange (right side) of tube furnace and provides a wide measure range (10^-5 ~ 1000 torr)
|
|
Vacuum Sealing Flanges
|
Two stainless steel flanges with both vacuum gauge and valve. The leaking rate of the flange is 6 mtorr/min in max. and 2 mtorr/min in stable conditions. Click the picture below to get details of both chart and data measured by CE certified vacuum meter:
Note: For the 24 hours curve display the time segment through 08:00:00~21:10:00 in X-axis is skipped over in the chart; therefore, a steep variance is present.
|
|
Oxygen Monitoring
|
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
|
Vacuum Pump
|
|
|
Gas Flow Meter and Pressure Meter
|
1) Compact direct read flow meter, 10-100 cc/min
2) Compact direct read flow meter, 16-160 cc/min
3)Compact direct read flow meter, 25-250 cc/min
- Four pressure meters are installed inside the mobile cart which is able to monitor three types of flowing gas pressure as well as the pressure of mixing tank.
|
| Valves |
Four stainless steel valves are installed in the side panel of mobile cart to control mixing of three inlet gases separately. |
|
Dimensions
|
- Furnace: 550 x 380 x 520 mm
- Bottom Mobile case: 600 x 600 x 597 mm
|
|
Net Weight
|
~ 60 kg
|
|
Shipping weight
|
200 lbs
|
|
Shipping Dimensions
|
Two cases in one pallet: 45" x 45" x 35" /case
|
|
Warranty
|
One year limited manufacturer's warranty (Consumable parts such as processing tubes, O-rings and heating elements are not covered by the warranty, please order replacements at related products below).
|
|
Laptop, software & WiFi Control (Optional)
|
|
|
Compliance
|
 CE Certified
|
|
Application Notes
Click here to learn the installation of a gas regulator
|
|
|
Operation Instructions
|
  
|
|
|
| | |
|
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed. | |
| | |
|
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop
MTI-UCSD Battery Fabrication Lab
MTI Sponsors the Postdoctoral Awards
Upcoming Shows:
|
|