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1200C Max. Slid-able Dual Zone PECVD Furnace w/ Gas Delivery & Vacuum Pump - OTF-1200X-II-PEC4SL-LD
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Transported by LTL Freight (Truck)
Product Options
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Personalization
Upgrade to Eurotherm Temp Controllers (Dual )
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OTF-1200X-II-PEC4SL is a multi-zone slidable PE-CVD tube furnace system consisting of a 300W RF plasma source, with optional tube size and an integrated slidable rail, 4 channel precision mass flow meter with gas mixing tank, and a high-quality oil-less vacuum pump. Such a PE-CVD furnace is a new tool to grow nanowire or graphene with the following benefits:
- Lower temperature processing compared to conventional CVD
- High heating & cooling rate using a sliding furnace
- Each heating zone to create a thermal gradient up to 200ºC
- 1100ºC Max. working temperature
- Offers a wide range of material deposition, such as Carbon & ZnO nanowire (or tube) and single-layer graphene
SPECIFICATIONS
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Model
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OTF-1200X-II-50-PEC4SL |
OTF-1200X-II-80-PEC4SL |
OTF-1200X-III-5-PEC4SL |
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Tube Size
(Pls select in options bar)
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2" (50mm) OD x 1.7" ID x 71" Length |
3.14" (80mm) OD x2.83" ID x71'' L
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5" (130mm) OD x 4.8" ID x 79'' Length |
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Furnace
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OTF-1200X-II-50 |
OTF-1200X-II-80 |
OTF-1200X-III-S-130 |
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Features
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- Two programmable precision temp. controllers with 30 segments.
- Two separately controlled Heating Zones:
- 200mm length for each heating zone
- 400mm total in heating length
- 250mm constant temperature heating area if both zones were heated at the same temperature
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- Two programmable precision temp. controllers with 30 segments.
- Two separately controlled Heating Zones:
- 200mm length for each heating zone
- 400mm total in heating length
- 250mm constant temperature heating area if both zones were heated at the same temperature
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- Three programmable precision temp. controllers with 30 segments.
- Three separately controlled Heating Zones:
- 200mm length for each heating zone
- 600mm total in heating length
- 480mm constant temperature heating area if all zones were heated at the same temperature
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Plasma RF Power Supply
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- Output Power: 5 -300W adjustable with ± 1% stability.
- RF frequency: 13.56 MHz ±0.005% stability.
- Reflection Power: 200W max.
- Matching: Automatic
- RF Output Port: 50 Ω, N-type, female
- Noise: <50 dB.
- Cooling: Air cooling.
- Power: 208-240VAC, Single Phase, 50/60Hz
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Anti-corrosive Pressure Gauge
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- 3.8x10-5 to 1125 Torr measurement range
- Anti-corrosive, gas-type independent
- High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection
- Fast atmospheric detection eliminates waiting time and shortens the process cycle
- Easy to exchange plug & play sensor element
- Click the pic to view the detail spec.
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Vacuum Pump Station and Valves
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- Heavy-Duty Rotary Vane Vacuum Pump (7.8 CFM, 240 L/m) with Two-Stage Exhaust System installed in the bottom case
- KF25 adapter and stainless steel pipe are connected between the pump and tube flange with a ball valve for the customer's plug and play
- 10E-2 Torr vacuum can be achieved inside the processing tube
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Mass Flowmeters & Gas Mixing Station
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- It is installed in a heavy-duty mobile cart where the tube furnace can be placed on the top. The LCD touch screen is integrated to provide easy control of the gas flow rate of each independent channel.
- Working Temperature: 5~45 ºC
- Max. Pressure: 3x106 Pa
- Accuracy: ±1.5% FS
- Liner: ±（0.5-1.5）%F.S.
- Duplicate accuracy: ±0.2%F.S.
- Controlling Range:
- Controller 1: 0~100 SCCM
- Controller 2: 1~199 SCCM
- Controller 3: 1~199 SCCM
- Controller 4: 1~499 SCCM
- Click the picture left below to order bubbler or evaporator for CVD， constant pressure control module
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Heating & Cooling Rates
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- RS485 port and software are installed and allow remote control temperature profile by PC ( not included, customer can order one from here )
- In order to achieve Max. heating rate, the user must preheat the furnace to the desired temperature, then slide the furnace to the sample zone of the tube
- In order to achieve the Max. cooling rate, move the heated furnace from hot zone to cold zone
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Heating Rate:
15°C/sec (RT - 150°C);
10°C/sec (150°C - 250°C);
7°C/sec (250°C - 350°C);
4°C/sec (350°C - 500°C);
3°C/sec (350°C - 550°C);
2°C/sec (550°C - 650°C);
1°C/sec (650°C - 800°C);
0.5°C/sec (800°C - 1000°C);
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Cooling Rate:
15°C/sec (1000 - 950°C);
10°C/sec (950°C - 900°C);
7°C/sec (900°C - 850°C);
4°C/sec (850°C - 750°C);
2°C/sec (750°C - 600°C);
1.5°C/sec (600°C - 500°C);
1°C/sec (500°C - 400°C);
0.5°C/sec (400°C - 300°C);
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Overall Dimensions
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 2000mm L X 800mm W X 1500mm H |
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Shipping Weight & Dimension
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Shipping Weight: 1500lbs
Total 4 Pallets: (1) 48"x40"x60" (2) 48"x40"x40" (3) 48"x40"x40" (4) 81"x52"x40"
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Warranty
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One-year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
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Compliance
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- CE Certified
- NRTL (UL61010) or CSA certification is available upon request at extra cost.
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- Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.02 MPa (relative P)
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- The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
- Click here to learn How to set up a quartz/ ceramic tube and vacuum flange for the MTI Tube furnace. Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
- MTI reserves the right to modify its PE-CVD design at any time without notice but promises quality in future designs that meet and exceed the specifications above.
- For operating the PECVD system with a tube size larger than 4", please always keep more than 1-meter distance from the plasma source after the plasma generator starts working
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Operation Video
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