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3 Zone Tube Furnace with 8.5" - 11" Quartz tube and Flange (1100C, 12"+12"+12" Heating Zone) - GSL-1100X-XX-III


Transported by LTL Freight (Truck)

Product Options

tube size:

Personalization

Upgrade to Eurotherm Temp controller( 3 zone)+15" Laptop+ USB Cable
GSL-1100X-XX-III furnace is a three-zone tube furnace with 8.5" or 11"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. Three 30 segment programmable controllers are built-in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gas conditions. It is an excellent tool for annealing, diffusing, and sintering processes.
SPECIFICATIONS
Model GSL-1100X-8.5-III GSL-1100X-11-III
Fused quartz tube size
  • High purity quartz tube
  • Warning: quartz tube is fragile, please handle with care. Warranty does not cover the broken tube by use
Size:  
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
Size:  
279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
NOTE: The customers must define one tube size before purchase. It is very difficult to change the tube size after because the chamber liners need to be replaced in order to fit the different tube sizes. 
Quartz boats (optional) Max. 6" wafer boat compatible

Max. 8" wafer boat compatible
    
Furnace structure
  • Double-layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from the inside tube.   (Ceramic blocks must be fully inserted into the furnace chamber before heating
  • This furnace can be used as an annealing or diffusion furnace for 8" wafer uses a quartz boat at the related product below
  •    Holding 8" wafer 

Heating zone
  • Total heating zone length 900 mm (36")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone:
    • 750 mm (if three zones are in the same temperature within +/- 3°C)  longitude direction
    • 600 mm  (if three zones are in the same temperature within +/- 1°C) longitude direction
    • +/- 3 oC along the cross-section
Working temperature

  • Max heating temperature: 1100°C ( < 1 hour )
  • Normal working temperature: 200~1000°C 
  • Max heating & cooling rate: 10°C/min
  • Temperature uniformity: please click the pic left to enlarge
  • Optional:  If use GE special quartz tube, working temperature can reach 1150oC under vacuum at the extra cost
Temperature control
       
  • Three digital controllers with PID/self-tuning functions and 30 segments programmable.
  • Thermocouple: three K type thermocouples (one for each zone)
  • Control accuracy: +/- 1°C
  • Eurotherm 3000 Temperature Controllers with ± 0.1ºC accuracy  is available upon request at the extra cost
Vacuum sealing & Flange
  • A pair of water cold SS vacuum sealing flange (Hinged Type) and 4 pieces of silicon O-ring are included.
  • Left Side Flange: Vacuum gauge, stainless steel needle valves, and 1/4" barbed hose fitting.
  • Right Side Flange: KF40 vacuum port with KF-40 Vacuum Right-Angle Valve for easy connection to KF40 bellows and pump. ( If using a pump with a KF25 port, you will need an adapter KF40-KF25.
  • One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.
  • Vacuum Level: 10-2 torr by heavy-duty mechanical pump and 10-4 torr by regular turbo-pump.  5x10-7 torr can be reached by 700 L/s high-speed turbopumps and a modified flange adaptor
  • Arecirculatingwaterchiller( 16L/min)is included for cooling flnges
        
Options
 Click to enlarge
  •                    
Rated Voltage
  • Single Phase, 220V AC, 50/60 Hz
  • AWG 8# Power cord is included (without plug)
Power consumption
Max. 8KW (50A breaker required)
Product Dimension
1879 L x 680W x 920 H mm (74" L x 24.5" W x 37" H)
Net weight
200kg
Shipping dimension
80" x 40" x 70"
Shipping weight
800 lbs
Warranty
  • One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings, and quartz tube are not covered by the warranty)
  • You may order a replacement quartz tube at the link below 
Laptop, software  (Optional)
    
  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial)
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipes, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
Compliance
  • CE Certified
  • NRTL or  CSA Certification is available upon request, additional charges will apply

NOTE
Operation Instructions     
Warning
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure <  0.2 bar / 3 psi
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM for reducing thermal shocks to the tube


CONSUMABLE PARTS LIST
No. Description Quantity Picture GSL-1100X-6-III GSL-1100X-8.5-III GSL-1100X-11-III
01 Quartz tube 1 pc 152 O.D x 143 I.D x 1300mm L
(6" O.D x 5.6" I.D x 51" L)
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
02 Hinged type vacuum sealing assembly 1 set EQ-FL-152 EQ-FL-213 EQ-FL-278
03 O ring for flange cap 2 pcs EQ-SOR-152 EQ-SOR-213 EQ-SOR-278
04 O ring for inner flange 4 pcs EQ-SOR-168 EQ-SOR-230 EQ-SOR-295
05 KF-40 quick clamp 2 pcs EQ-KF-Clamp-D40
06 KF-40 right angle vacuum valve 1 pcs EQ-KF-Valve-D40
07 KF-40 Blank flange 2 pcs EQ-KF-BF

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