Browse Categories

Hi-Vacuum Turbo-pump Station with Backing Pump - EQ-PAC-LD

Product Options

This Turbo-molecular Pumping Station consists of a high-quality Pfeiffer's High Speed ( 226L/min) Oilless Dry Vacuum Pump and a turbo-molecular pump, which provides faster speed than and enables pumping larger tube chambers up to 11" Dia. Large LCD digital can display the instant pressure reading and the information pump's running condition. 600mm x 600m top table can withstand any types of equipment up to 600 Lbs.  It is an ideal tool for most of MTI's tube furnaces to achieve high vacuum >10-4 torr
Mobile Cart Structure

  • Larger Mobile cart size: 800 (L) x 700 (H) x 600(H), mm 
  • Max. Loading:       600 Lbs on top
  • Molecular pump control Panel:   LCD digital
    Ultimate pressure 1e-7 torr. The real pressure depends on the volume of the vacuum chamber and connections. 
  • Inside:   Pfeiffer vacuum pump  made in Germany
  • Pumping Rate: 240 L/min or 8.5 CFM
  • Max. Vacuum 3e-3 Torr (0.4 Pa)
  • Heavy Duty Double Stage Rotary Vane Pump utilizes a proprietary advanced technology to increase performance and adaptability with extremely low noise generation
  • Please choose the voltage from the options bar.
Control panel One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
LCD screen - double lines parameters checking interface
make the working easier to be handled.
Pump and Accessories

  • Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge
  • Vacuum gauge with KF25 port to install to T -tube
  •  1000 mm length SS vacuum bellows with KF40 port to connect to furnace flange
  • One  KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on  flange


Volume Flow Rate
  • Nitrogen    N2     33 L/s
  • Helium      He     39 L/s      ( 2340L/minute)
  • Hydrogen  H2     32 L/s

Compression Rate

  • Nitrogen    N2     >1E11
  • Helium      He     6*1E6
  • Hydrogen  H2   >1E5

Ultimate Pressure

<7.5E-9Torr (1E-6Pa) without any leaking

Start-up Time

2 Min.

Working Range

From 750Torr to <7.5E-7Torr (1E5Pa ~ <1E-4Pa)

Backing Pumping Speed

0.9 m^3/H for 50Hz and 1.0m^3/H for 60Hz 

Duration /max. power

100/110 W

Mains Connection

90-132 V/ 185-265V (selectable)


50 Kg

Optional Accessories

Combinations of EQ-PAC-LD Turbo-molecular Pumping Station with EQ-VPC-MV Precision Vacuum Pressure Regulating System will be a solution for precisely controlling the vacuum pressure in a vacuum chamber/system.  Order Turbo-molecular Pumping Station with Precision Vacuum Pressure Regulating System from product options or Click the picture below for Precision Vacuum Pressure Regulating System

One-year manufacturer warranty.(Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned in below, especially: 
  • Pumping of corrosive or explosive media.
  • Pumping of condensing vapors.
  • Pumping of liquids.
  • Pumping of dust.
  • Operation with improper high levels of insulated heat input.
  • Operation in potentially explosive areas.)
Application Notes
(these parts are NOT included in the standard package)
  • To protect the environment & human health, please use Traps & Filters to minimize exhaust. 
  • To protect vacuum pump from damage by condensed vapors or small particles, please connect a cold trap or particle trap to the pump fore-line ( click on the pictures below for details ).
  • Service for the turbopumps is recommended every 4 years under conditions with light gas loads. 
  • TUV Certified  ( Turbo pump )
Manual  Operation Manual from Peiffer  Catalog


Standard Package 

EQ-KF-Valve-D40 KF-40 Vacuum Right-Angle Valve 1


 KF-40 SS Vacuum Bellows (1000 mm )



KF-25 Flexible Stainless Steel Vacuum Bellow (600mm)



 KF-40 Quick Clamp with Rubber O-Ring



 KF-25 Quick Clamp with Rubber O-Ring



 Reducing T-Tube : two KF40port and one KF25 port

 EQ-PV-Sensore  Vacuum gauge with KF25  & cable  1        
  • Pumping Rate (m3/h)
    • 50Hz:   8 m³/h    (2.2 L/s)
    • 60Hz:   9.6 m³/h (2.6 L/s)
  • Max. Vacuum ≤5x10E-2 Pa or  4x10E-4  torr
  • As a dual stage backing pump, it improves the pumping performance and enables the pumping of larger tube chambers up to 100 liters

Related Products

Shopping Cart
Your cart is empty.
Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
Mailing Lists
MTI sponsorships:
MTI Sponsors Thermoelectrics Workshop

MTI-UCSD Battery Fabrication Lab

MTI Sponsors the Postdoctoral Awards

Upcoming Shows:

COMBI 2022 September 26 - 30 Golden CO

242nd ECS Meeting October 9 - 13 Atlanta GA Booth 200

2022 MRS Fall Meeting Nov 27 - Dec 2 Boston MA

Recent Attended Shows:
John Goodenough 100th Birthday Symposium

2022 MRS Spring Meeting May 8 - 13 Honolulu Hawaii Booth 209

Click here to see our past conferences


1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.