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Atmosphere Controlled RTP Furnace for 8" Wafer up to 1000 ºC - VBF-1050X-H8


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Item Number: VBF-1050X-H8
Transported by LTL Freight (Truck)
VBF-1050X-H8 is an atmospherically controlled box furnace with IR heating lamps, which can reach 1000ºC with a 5ºC/second heating rate.  It is designed for rapidly annealing thin wafers up to 8" round or 6"square in diameter under vacuum and inert gases

SPECIFICATIONS

Furnace Structure


  • IR heating holder with water cooling is installed in a vacuum chamber ( 16x14x15")
  • The heating chamber of 8.5"x8.5" ( 200x200 mm) dia x 10 mm height 
  • 25 mm dia quartz observation window is built-in on the front door 
  • KF 25 vacuum port  and the valves of the gas inlet and outlet are built into the vacuum chamber
  • A mechanical vacuum gauge is included
  • A digital temperature controller with 3- segments programmable is included
  • A k-type thermal couple is included

Power

 
  • AC 208V-240V,  single phase, 50/60 Hz
  • 12 KW (60A breaker is required)
  • Note: A power cable is included without a plug. Please install a plug by yourself or the left  picture to choose a plug according to your lab requirement

Working Temperature

 

  • 30 segments programmable via a digital temperature controller
  • Working Temperature:    <= 800 °C continuously    Max. 1000 °C, < 30 minutes
  • Max. Heating rate:   <= 300°C/ min   (5°/second)
  • Max. Cooling:           <=  60ºC/min     (1°/second)
  • Temperature stability: +/- 1°C
  • RS485 port and soft is included for PC operation

    Heating Chamber & Water Chiller

        • Two IR heating plates are built-in stainless steel holders with water cooling jacket
        • 8.5" square x 10 mm height heating chamber with water cooling jacket, which can accept 8"x8"  wafer 
        • One quartz plate is placed in the bottom heating chamber to accept a wafer up to 8" x 5 mm thickness
        • One 16L/minute recirculating water chiller is included for cooling the heating chamber


        Vacuum level and Vacuum Pump
        & Gas delivery system
        ( optional)

        • 10- 2 torr via a rotary mechanical pump (cold condition) Pic. 1
        • 10-4 torr via turbopump (a cold condition with baking) Pic. 2
        • KF25 vacuum port  and gas valves are included
        • One mechanical vacuum gauge is included
        • The vacuum pump is not included. Please click the link below (Pic. 1&2) to order separately
        • Digital vacuum gauge up to 10-5 torr with KF16 port is optional  (Click Pic 3 to order)
        • You may order an inner gas delivery system by clicking Pic, 4
        •      Pic. 1    Pic. 2Pic. 3 Pic. 4

        Overall Dimensions

        Click the picture to see the details

        Net Weight

        45 kg

        Shipping Weight

        150 lbs

        Shipping Volume

        45"(L) x28"(W) x35"(H) 


        Warranty

        • One-year limited warranty with lifetime support
        • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

        Compliance
          

        • CE Certified
        • NRTL or CSA certification is available upon request at extra cost.

        Operation Demo Video

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        Notices
        1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
        2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
        3. The prices listed are subject to change without notice.