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1100C Vertical Vacuum Furnace (7.5"ID, 7.6 Liter) with Automatic Bottom Loading - VBF-1200X-E8


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Item Number: VBF1200XE8
Transported by LTL Freight (Truck)
VBF-1200X-E8 is a vertical vacuum furnace with a 7.5" ID x 13.4"L-quartz chamber and automatic bottom loading mechanism designed for easy sample loading. Water-cooled SS vacuum flanges are lifted via the motor and can achieve vacuum 10^-2 to 10^-5 torr through a mechanical or molecular pump. It is designed for sintering material or annealing semiconductor wafers (up to 6") under vacuum or various other gas atmospheres with a temperature up to 1100°C. A programmable temperature controller, vacuum pump and recirculating water chiller are included for immediate use.

SPECIFICATIONS

Structure
   

  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.  
  • High purity fibrous alumina insulation for maximum energy saving.
  • Water-cooled vacuum flange for longer service life
  • Quartz chamber for clean treatment
  • Automatic bottom loading for easy operation (max. opening 240mm)
  • The vacuum level can reach 10-5 torr by turbopump.

Power

3500 W Max. 

Voltage

Single-phase 208 - 240 VAC, 50/60Hz (20 A breaker required)

Working Temperature

  • <= 1000 °C continuously

  • Max. 1100 °C, < 30 minutes
  • Temperature Uniformity: +/- 2°C

Temperature Distribution @900 °C

Heating Elements    

High-quality Ni-Cr-Al resistance wire as heating elements

Quartz Tube Size & Effective Heating Area

  

  • Tube size: 8" O.D. x 7.5" I.D x 13.4" L. 

  • Heating area: 7.5" ID x 8.5" Depth (7.6 Liter)

  • Uniform Temperature zone: 4" diameter x 3.5" depth in center position within +/- 5ºC

  • The quartz tube is replaceable ( click picture on left to order spare tubes )


Vacuum Flange 






  • Stainless steel vacuum flange with dual high-temperature silicone O-rings.
  • DC motor with a remote controller drives the opening and closing operations of the flange.
  • One KF25D port on the left side of the furnace for connection to the vacuum pump.
  • A Quartz Thermal Block (filled with fibrous alumina) is included to prevent radiation and dissipation of heat. It also provides excellent vacuuming while ensuring a clean environment inside the chamber.
  • A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting -- one 16L/min recirculating water chiller is included as well.
  • One high-quality mechanical vacuum pump, KF25 Vacuum Fitting with KF25 Right-Angle Valve and a one meter long KF25 Bellows are included ( you may use a molecular pump to achieve 10^-5 Torr vacuum )
  • Digital vacuum meter with a wide range up to 10-4 torr is included for vacuum pressure measurement.
                         



Temperature Controller
  • MET certified 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communication Port.
  • K-type thermal couple.
Optional:  
  • The furnace may be operated via PC by installing a control module. Pls order an MTS-02 control module at extra cost. 
  • If you order the PC control module together with the furnace, we will install and test it before shipping. Recommend you to order a computer (laptop) from us to avoid the software installation problem. For more information please click here.
                       


Gas Flow And Pressure
(optional )



  • There is a gas inlet (1/4" hose adapter ) with a valve on the left side of the furnace ( see bottom left picture below )
  • Inert gas and oxygen gas flow can be introduced into the chamber via the inlet  (Attention: MTI does not recommend using its products under hazardous conditions. We will not be liable for any damages incurred under hazardous conditions. For using hydrogen gas, it is prudent to place the furnace under a fume hood.)
  • You may choose a gas mixer to deliver multiple gases with control over gas composition and flow rate (click pictures below to order separately).
                  New Version front panel   

Overall Dimensions

700mm(L) x 650mm(W) x 1400mm(H)

Net Weight

160 kg

Shipping Weight

500 lbs

Shipping Volume

48"(L) x40"(W) x70"(H) 

Warranty

  • One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty.

Laptop, software & WiFi Control (Optional)

  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) is ncluded
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profiles, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: The software is only compatible with MTI’s Yudian Temperature Controller
  •     

Compliance

  • CE Certified
  • NRTL / CSA Certification is available upon request at the extra cost
  •                 

Application Notes

Click here to learn the installation of a gas regulator
  • Quartz tube furnace is designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures is only safely used below 1000°C
  • The furnace can be used for brazing of two flat samples via top dead weight under vacuum at <1000°C

Operation Demo Video &  Instructions

   

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.