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1100°C Bottom-loading Vacuum Furnace (8.6"ID, 7.6 Liter) - VBF-1200X-E8


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Item Number: VBF1200XE8
Transported by LTL Freight (Truck)
VBF-1200X-E8 is a vacuum furnace with a bottom loading sample stage for large sample annealing at ease. It comes with a quartz chamber of 8.6" ID x 13.4"H and a water-cooled SS flange, which enables reaction under a vacuum or controlled atmosphere. It is designed for bulky material sintering and annealing for a stack of wafers (up to 6") up to 1200°C. The optional manual sliding door also reduces heat loss during sample loading. The extra air knives can also quickly quench the sample to room temperature.

SPECIFICATIONS

Structure
   

  • Double-layer steel casing with air cooling keeps furnace surface < 60°C
  • High purity fibrous alumina insulation for maximum energy saving
  • Water-cooled vacuum flange for better vacuum seal and longer service life
  • 8.5" ID Quartz chamber works under both vacuum and gas flow.
  • Motor-driven bottom loading for large sample loading at ease.
  • Optional air quenching feature. 

Power

  • 208-240 VAC, 1 ph, 50/60 Hz.
  • 3500 (20 A power receptacle is required)
  • A 10-foot power cable is included but without a plug

Working Temperature

  • Fe-Cr-Al doped Mo heating elements. 
  • ≤1100°C continuous
  • ≤1000°C continuous
  • Heating rate: 20°C/min

Temperature Uniformity @ 900°C

            

Temperature Control

  • Up to 30 segments for temperature ramping, dwelling, and cooling.

  • Built-in automatic PID control with auto-tune, overheating, and T/C broken protection.
  • ±1℃ temperature accuracy.
  • RS485 communication port
  • K-type thermocouple
  • Optional MTS-02 for remote temperature control and logging at PC
  • Optional EPC 3004 Eurotherm temperature controller

Heating Chamber

  

  • Chamber size: 9" O.D. x 8.5" I.D. x 13.4" L   ( 230 OD x 218ID x 340 H, mm)
  • Effective heating area: 8.5" ID x 8.5" Depth (218 ID x 216 H mm, 8.6 Liter)
  • One quartz thermal block filled with fibrous alumina is included to prevent thermal loss. 
  • The quartz heating chamber is replaceable. 
Gas Quenching (Optional) 

  • 4 air blades are included for fast cooling once the sample is unloaded.
  • Inert gas cylinders or compressed air is required as a quenching medium but not included.
  • Stainless steel mesh guards are included to prevent thermal injury during quenching. 

Flange
  • One water-cooled stainless steel flange with silicone o-rings is included. 

Vacuum

     

  • One KF25 port is built-in for vacuum pump connection.
  • One FYP dual-stage rotary vane pump is included.
  • One KF25 bellow and one angle valve are included.
  • One Pirani vacuum gauge (up to 10-4 torr) is included.
  • Pfeiffer 33 L/s turbo pump is also available for high vacuum operation. 

Gas Flow
  • One 200 - 2000 sccm float flow meter is included for inert gas flow during heat treatment.
Water Chiller
  • one 16L/min recirculating water chiller is included
         

Overall Dimensions

700mm(L) x 650mm(W) x 1400mm(H)

Net Weight

160 kg

Shipping Weight

500 lbs

Shipping Volume

48"(L) x 40"(W) x 70"(H) 

Compliance
  • CE Certified
  • NRTL / CSA Certification is available upon request at the extra cost

Warrant

  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.)
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty
Application Notes

Click here to learn the installation of a gas regulator
  • Quartz tube furnace is designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 MPa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  •  Vacuum pressures in the furnace shall be used below 1000°C under vacuum processing
  • The furnace can be used for brazing of two flat samples via top dead weight under vacuum at <1000°C

Operation Demo Video &  Instructions

          

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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.