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1100C Max 8.5" I.D. Vertical Vacuum Chamber Furnace with Flange - VBF-1200X-V9


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Item Number: VBF-1200X-V9
Transported by LTL Freight (Truck)
VBF-1200X-V9 is a Vertical vacuum-sealed furnace. It equips a 9"OD x 8.6" ID x 13.4"L Quartz tube chamber with stainless steel flange and valves, which can achieve a vacuum of 10-5 via Torr turbopump. It is designed for calcining or annealing semiconductor wafers (up to 8") under vacuum or various other gas atmospheres with a temperature up to 1100°C. 

SPECIFICATIONS

Power

  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  • 3 KW max. 
  • Note: Power cable included but without the plug. Please install a plug by your own or click the link below the picture to choose a plug according to your country or your lab requirements


Working Temperature

  • <= 1000°C continuously

  • Max. 1100°C, < 30 minutes
  • Temperature Uniformity: +/- 2°C

Heating Rate

  • Max. 20°C/ min
  • Recommended: 10°C/ min

Heating Elements    

  • High-quality Ni-Cr-Al resistance wire 

Quartz Tube & Effective Heating    

  • Tube size: 9" O.D. x 8.6" I.D x 13.4" L (230 O.D. x 218 I.D. x 340 H, mm)

  •  Capacity: ~ 8 liters
  • The quartz tube is replaceable (click picture left to order spare tube)
  • Max. loading 40Kg
Vacuum Flange

  • Stainless steel vacuum flange with dual high-temperature silicone O-rings with water cooling jacket
  • One 1/4 gas inlet and the outlet port are built on the top of the flange with needle valves
  • One bored Al2O3 foam refractory block (190Dia x 50mm) is provided
  • K25 port is built-in for connecting to the vacuum pump
  • Mechanical Vacuum Gauge (included as standard accessory), which ranges from -0.1 to 0.15Mpa
Water Cooling

Temperature Controller

     
  • NRTL certified digital temperature controller is included
  • Proportional–integral–derivative control (PID control) and auto-tune function
  • 30 segments programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • THE Default DB9 PC communication port included for connecting to PC
  • Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy

Options
   

  • Digital Pressure Gauge (optional) A gas-type independent(above 10mbar) digital vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. (Click Pic. 1 to order)
  • You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
    Pic. 1New Version front panelPic. 2



Vacuum Pressure





  • Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
    • 10-2 torr via mechanical pump within 30 minutes without thermal Block
    • 10-4  torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C
  • Optional: 
    • The vacuum pump and pipe are not included, please click Pic.1 to order
    • For achieving a higher vacuum level, a Turbopump Station is necessary. (click Pic.2)
    • Spare sealing O-ring is available at extra cost (click Pic.3)
    •  KF25 Right-Angle Valve for quick connection to KF25 Bellows (click Pic.4)
       Pic. 1       Pic. 2   Pic. 3      Pic. 4

Options

You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
New Version front panel

Overall Dimensions

     (click picture to see details)

Net Weight

80 kg

Shipping Weight

200 lbs

Shipping Volume

45"(L) x 28"(W) x 35"(H) 


Warranty

  • One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.

Compliance
  

  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.

    Warning  


    Click here to learn the installation of a gas regulator

    • Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars 
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
    • A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes to undergo deformations under vacuum.
    • The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks

    Operation Demo Video

       

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    Notices
    1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor costs.
    3. The prices listed are subject to change without notice.