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1600C Vertical Atmosphere Controlled Furnace (11" I.D., 13 Liter) with Automatic Bottom Loading - VBF-1600X-B

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Item Number: VBF1600XB
Transported by LTL Freight (Truck)
VBF-1600X-B is a vertical atmosphere controlled furnace with an 11" I.D. x 13"L  sealed chamber and automatic bottom loading mechanism.  Water-cooled SS vacuum flanges are lifted via the motor and can achieve vacuum 10-2 torr through a mechanical pump. It is designed for sintering material or annealing semiconductor wafers under vacuum or various other gas atmospheres with a temperature up to 1600°C. A programmable temperature controller, vacuum pump, and recirculating water chiller are included for immediate use.



  • Double-layer steel casing with water cold vacuum-sealed  chamber
  • High purity fibrous alumina insulation for maximum energy saving
  • Automatic bottom loading for easy operation
  • The automatic pressure control and protection is built-in for safe operation
  • Programmable temperature control up to 1600ºC


  • Single-phase 220 VAC, 50/60Hz (20 A breaker required)
  • 13 KW Max. 

Working Temperature

  • 800°C - 1600°C continuously
  • Temperature Uniformity: +/- 0.5°C
  • Recommended heating rate: ≤10°C/min

Heating Elements    

  • MoSi2

Vacuum Chamber

  • Effective heating chamber size: 280 mm diameter x 300 mm H
  • Vacuum sealed stainless steel chamber with fibrous alumina thermal insulation layer inside
  • A water cooling jacket on the outside of the chamber and flange to protect the vacuum sealing O-rings 
  • One 16L/min recirculating water chiller is included  ( Pic. 1)
  • Vacuum ChamberBottom loaded flange driven by the electric motor for easy sample load of 50 Kg max.
  • One high-quality mechanical vacuum pump is included to achieve a 10-2 torr level. (Pic. 2)
  •    Pic. 1Pic. 2

Control Panel
  • Touch screen control panel for controlling temperature and inert gas pressure.
  • Temperature control
    • Eurotherm Temperature Controller inside
    • 1 program, 24 segments programmed with ramping, cooling, and dwelling steps
    • Built-in PID automatic control, Auto-Tune function with overheating & broken thermocouple protection
    • +/- 0.1 ºC temperature accuracy
    • B-type thermal couple
  • Pressure control
    • Furnace purging function by manual or auto mode
    • Constant pressure control can be achieved between 100 - 115 KPa
    • Safety pressure release valve built-in
    • Two gas flowmeters are installed in the front panel. 
  • PC control
    • RS485 port is built-in for PC operation
    • Please order the laptop along with the furnace from us, we will install the software and test it before shipping. 

Overall Dimensions

1500mm (L) x 1050mm (W) x 2040mm (H)

Net Weight

500 kg


  • One year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.)
  • ATTENTION: Any damages caused by the use of corrosive and acidic gases are not under the coverage of MTI One Year Limited Warranty


  • CE Certified
  • NRTL / CSA Certification is available upon request at an extra cost

Operation Demo Video &  Instructions


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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.