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900°C Max. 8.5" I.D. High-Vacuum Steel Chamber Furnace - VBF-900X-S8

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Item Number: VBF-900X-S8
Transported by LTL Freight (Truck)
VBF-900X-S8 is a high vacuum furnace with an 8.5" ID x 13.4"L S310 stainless steel chamber, water cold flanges, and observation window,  which can achieve a vacuum of 10-6 via Torr turbopump. It is designed for annealing semiconductor wafers (up to 8") under vacuum or inert gas atmospheres with a temperature up to 900°C. 



  • Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (25 A breaker installed)
  • 8 KW max. 
  • Note: Power cable included but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab requirements

Working Temperature

  • <= 800°C continuously
  • Max. 900°C, < 30 minutes
  • Temperature Uniformity: +/- 2°C

Heating Rate

  • Max. 10°C/ min
  • Recommended: 10°C/ min

Heating Chamber

  • Two heating Modules via High-quality Ni-Cr-Al resistance wire for better temperature uniformity
  • S310 refractory stainless steel chamber with the dimension of 9" O.D. x 8.6" I.D x 23" H
  • Water cold vacuum-sealed flange with KF25 Vac. port with valve and gas inlet &outlet valves (Pic.1)
  • Quartz thermal block is included
  • Mechanical vacuum gauge is built-in
  • Vacuum level: 10-6 torr by turbopump and 10-3 by rotary pump ( Click Pic. 2- 4 to order the pump )
  Pic. 1     Pic. 2    Pic. 3   Pic. 4
Temperature Controller

  • Two programmable temperature controllers are included
  • Programmed with ramping, cooling, and dwelling steps
  • Built-in over-temperature alarm and thermocouple failure alarm
  • +/- 1 ºC temperature control accuracy
  • THE Default DB9 PC communication port and software are included for PC operation.
  • Eurotherm Temperature Controller is available at the extra cost with +/-0.1°C accuracy


  • A water cooling jacket has been built inside the flange to protect the vacuum sealing assembly from melting at over 200°C.  16L/min water flow required. Please click the picture below left to order the water chiller (Pic. 1)
  • Digital Pressure vacuum gauge with a wide range between 3.8 x 10-5 to 1125 Torr. (Click Pic. 2 to order)
  • You may choose a gas mixer to deliver multiple gasses with precision flow rate control (click Pic. 3) 
  • This furnace can be modified to a verticle hydrogen furnace at an extra cost. (Pic. 4)
  • Pic. 1Pic. 2Pic. 3 Pic. 4

Overall Dimensions

     (click picture to see details)

Net Weight

100 kg

Shipping Weight

250 lbs

Shipping Volume

45"(L) x 28"(W) x 35"(H) 


  • One-year limited warranty with lifetime support (consumable parts such as processing tubes, and O-rings are not covered by the warranty, please order replacements at related products below.).  
  • ATTENTION: Any damages caused by the use of corrosive and acidic gasses are not under the coverage of MTI One Year Limited Warranty.


  • CE Certified
  • NRTL or CSA certification is available upon request at extra cost.


    Click here to learn the installation of a gas regulator

    • Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars 
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.
    • A maximum temperature of 1000°C should be imposed on all quartz tube furnaces to avoid the quartz tubes undergoing deformations under vacuum.
    • The flow rate for gasses should be limited to < 200 SCCM for reducing thermal shocks

    Operation Demo Video


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    1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
    2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
    3. The prices listed are subject to change without notice.