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12500 RPM Ultra-Hi Speed Spin Coater for 4" Max w/ Vacuum Chuck & Optional Heating - VTC-100PAX
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Please call for the delivery time
Item Number: VTC-100PAX
Transported by LTL Freight (Truck)
Personalization
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VTC-100PAX is ultra-fast spin coater up to 12500 rpm for Max. 5" dia. wafer. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has an LCD display for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible. The spin-coater can be used in the glovebox with Ar gas.
SPECIFICATIONS:
Main Features
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- 500 ~ 12500 RPM spinning speed programmable ( 13000 max for < 60 seconds)
- Accept substrate from 10 mm to 5"
- PP chamber for anti-corrosive operation.
- One gas inlet port on top of the cover which can fill inert gas during coating
- One 20ml Plastic Syringe is included
- Suitable using Ar gas (vacuum pump must be outside glovebox)
- The safety interlock is integrated into the lid
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Vacuum Chuck |
- Chamber size: 150 mm diameter
- 2 sets of PP anti-corrosive vacuum chucks with different sizes (O-ring ID: Φ20mm ), which can hold substrate from 20mm to 100 Dia.
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Vacuum Pump
 Pic. 1 |
- One Compact Oil-Free Diaphragm Pump Made in Germany is included with UL/CSA/Ce certified, please click the picture left for specification details. (Pic.1). This pump can be used in Ar gas glovebox.
- Vacuum grade rubber pipe is included for immediate use.
- For Ar glove box user, feedthrough is required for connecting the spin coater to the vacuum pump outside of the glovebox. The feedthrough is NOT included in the standard package, please contact us for more information.
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Control Panel
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- The digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click picture below-right to see typical program setting)
- Speed: 500 rpm - 12500 rpm programmable
- Duration: 0 - 999 seconds for each segment
- Acceleration: 100 - 2000 rpm / sec adjustable
- Speed Accuracy: < 5%
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| Input Power |
- AC 110V or 220V is selectable ( please confirm before order )
- 1000 W total for the oilless pump and spin cater
- 24VDC high-speed motor
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Gas Inlet |
6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under an inert gas flow environment.
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Liquid Injection
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Optional
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- Option 1: PE Heating cover with a digital temperature controller up to 120°C(<10 minutes) is available upon request at extra cost. This is a short drying process (usually takes several seconds or Max.10 minutes) which can dry and solidify the coating and remove the residual solvent after the coating process is completed. Click demo video & picture below for detail.
- Option 2: PTFE Heating cover + PTFE vacuum chuck set is capable of drying temperature up to 200°C(< 5 minutes). Vacuum chuck and chamber also need to be replaced by PTFE material to withstand high heating temperature. Please click PTFE Heating cover and chuck set to learn.
- Option 3: UV lighting Cover with the controller for drying polymer film quickly (New)
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 P1  P2  P3  (Demo video for heatable cover)
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Product Dimensions |
 -- Click the picture to see detail |
| Net Weight |
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Operation Manual & Video
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 (video for heatable cover)
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| Application Notes |
- In order to achieve optimal coating quality, please consider cleaning substrates by a plasma cleaner (click the picture below for more details) prior to coating. This will significantly reduce the surface tension on the substrates.
- Cleaning instruction for the spin coaters.
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Warranty &
Compliance |
- One year limited with lifetime support
- Rusting and damage due to improper storage condition or maintenance are not covered by warranty
- CE Certified
- NRTL or CSA certification is available at the extra cost.
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| Warnings |
- Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
- If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
- For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
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| Shipping Dimensions |
40"(L) x 30"(W) x 30"(H) |
| Shipping Weight |
46 kg (100 lbs) |
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Sale Price: Starting at USD$3,898.00
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Sale Price: Starting at USD$295.00
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Sale Price: Replacement Part for Existing Customers
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