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Compact DC Magnetron Sputtering Coater With Gold Target for Noble Metal Coating - VTC-16-D

In stock
Item Number: VTC16D
Transported by LTL Freight (Truck)

VTC-16-D is a Desktop Magnetron Sputtering Coater with a 2" head and height adjustable sample holder. It is designed for thin-film coating for noble metals (Au, Ag, Pt), especially for coating conductive gold film on SEM samples. One 2" gold (4N) target is included. To sputter active metals, such as Al, Mg, Zn, or Carbon target, please consider the High Power magnetron sputtering coater or thermal evaporation coater

  • Compact magnetron sputtering coater, for coating conductive noble metal film on SEM samples (Au, Ag, Pt)
  • One 2" gold (4N) target is included
Sputtering Head
  • 2" diameter
  • 500 VDC
  • 0 - 50 mA (max.) adjustable sputtering current
  • Over-current protection
  • Manual shutter for pre-sputtering cleaning. 
Sputtering time
  • 1 -120 seconds adjustable
Vacuum Chamber
  • Quartz glass tube, 165 mm OD. x 150 mm ID x 150 mm Height
  • Please click here to order the spare quartz chamber.
  • KF25 port for vacuum pump. 
  • Ultimate pressure is about 1 Pa via a mechanical pump. (vacuum pump is optional)
Pirani Vacuum Gauge

  • Range: 1e-4 - 1000mbar (1e-4 - 750 torr)
  • Accuracy:
    • 1000 - 20mbar, 3% of reading
    • 20 - 0.002mbar, 2% of reading
  • Repeatability: 2% of reading
Sample Stage
  • 2" diameter
  • height adjustable, 25 - 70 mm from the sample to the target
Vacuum pump (optional)

  • The double stage rotary vane pump EQ-FYP is recommended.
  • A turbopump is also available to achieve 1.0E-5 Torr 
Gas Inlet
  • One 1/4" compression tube fitting as the gas inlet. 
  • One leak valve to adjust the leak rate of Ar gas. 
Product Dimension and Weight
  • 500 mm (L) × 350 mm (W) × 550 mm (H)
  • 20kg
Shipping Weight & Dimension
  • 80 lbs
  • 45" x 45" x 40"
Operation Instructions
  • CE Certified
  • NRTL certification is NOT available temporarily.
  • One-year limited warranty. Consumables are not covered. 
Application Notes
  • To use the sputtering coater inside the glove box, the controller and coater base will be separated. (Pic.1)
  • For active metals, such as Al, Mg, Zn, or Carbon target, please consider our High Power magnetron sputtering coater (Pic. 2) or thermal evaporation coater. (Pic. 3)
  •   Pic. 1        Pic. 2       Pic. 3            

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