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Anti-Corrosion Spin Coater ( 8000 RPM & 6" wafer Max.) with Complete Accessories - VTC-200P

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Transported by LTL Freight (Truck)

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VTC-200P is Anti-Corrosion Spin Coater made of  Polypropylene (PP) material, which can be used for active acidic or alkali solution, especially suitable for use inside glovebox under Ar gas.   4'' dia. vacuum chuck is included for coating wafer upto  6".  The digital control box is separated from spin coater which allows you operate in the remote location. The spinning speed is variable from 500-8000 rpm with two programmable segments. The package includes the oilless vacuum pump and 20ml syringe for immediate use.  


  • Case and spin disk made of Polypropylene (PP) to resist most of the corrosive solutions.
  • Digital control box is separated from spin coater.
  • One filter is included in standard package. It is used to connect the pump and coater for preventing waste water from flowing into the pump.
  • One oil-less vacuum pump is included in the standard package; please click here for specification details.

Input Power
  • Default 220VAC, 50/60Hz,  single phase, 1000W Max.
  • 110V is available in optional bar ( with 1500W transformer )
  • A power socket on the back of the Digital control box is used to supply power to the vacuum pump. (The output voltage of this power outlet depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.)

Chamber  & Vacuum Chuck
  • Chamber diameter:  150 mm
  • PP anti-corrosive vacuum chuck Φ100mm, which can hold substrate upto 6" Dia. ( see bottom left picture)
  • If your sample < 10 mm, please order rubber cup from us at extra cost ( click picture bottom right )
Vacuum Pump
  • One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details. (Pic.1)
  • For Ar glove box user, we recommend our 24VDC vacuum pump for simple pump and coater connection with no feedthrough required. (Pic.2)

Spin Speed
  • Digital control panel with six programmable segments of different spin times and speeds
  • Maximum programmable spin time 6*60s = 360s 
  • 500 - 8000 RPM adjustable spinning speed  at each segment
Liquid Injecting

  • 20mL syringe is used to contain the coating material (Click Pic 1)
               - Pic 1      


  • You may choose Precision Electronic Single Channel Pipette: 20 - 200uL for more accurate coating (Click Pic 1 & 2 )
  • Using plasma cleaner to treat substrate surface before coating can improve film quality
  • You may consider our new product: Heatable syringe (Click Pic 3)                                                                                                    - Pic 1    - Pic 2    - Pic 3 
  • Heating cover with digital temperature controller up to 120 ℃ is available upon request at extra cost ($1950), which allow sample drying in-situ during and after coating (Click Pic 4 & 5)
  • Vacuum Flash Assembly for DIY Vacuum Flash-Assisted Solution Process (VASP), Up to 5 mTorr is available ( Pic 6)  
  • Vacuumable spin coater with digital gauge is available ( Pic. 7)
  • The EQ-OFDP-2 is a tiny silent powerful diaphragm pump made in Germany and provides an excellent vacuum performance, $1455 extra cost.
              - Pic 4         - Pic 5      - Pic 6     Pic 7 Pic 8
Motor  24VDC, Brushless,  200W max.:
Product Dimensions

Spin Coater:       25.2cm
(Φ) x 41cm(H)
Digital controller: 23cm(L) x32cm(W) x16cm(H)
Net Weight 25 kg 
  • CE Certified
  • NRTL certification is available upon request at extra cost  ( Please notice us before ordering if you need NRTL )
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty

Operation Manual & Video

Application Notes
  • Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
  • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions 40"(L) x 30"(W) x 30"(H)
Shipping Weight 46 kg (100 lbs)

Item # Description Qty
1 VTC-200P Desktop Spin Coater 1
2 Digital control box 1
3 4" ( 100mm) Vacuum Chuck 1
4 20mL Syringe for dropping coating solvent on the plate 1
5 500mm Hose for connecting vacuum pump 2
6 Filter (connect to vacuum pipe to keep water from flowing into pump) 1
7 Oil-less vacuum pump 1
8 Blue Adhesive Tape (6" W x 24" L)
9 Spin disk wrench 1

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