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Vacuumable & Atmosphere controlled Spin Coater ( 10K RPM & 6" wafer Max.) - VTC-200PV

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Transported by LTL Freight (Truck)

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VTC-200PV is an atmosphere-controllable spin coater with Polypropylene air tighten, which can make spin coating either under a vacuum or inert gas atmosphere.   The sample holder is included for coating wafer up to  6".  The digital control box is separated from the spin coater which allows you to operate in the remote location. The spinning speed is variable from 500-10K rpm with two programmable segments. The package includes the two-stage vacuum pump, digital vacuum gauge, and 20ml syringe for immediate use.  



  • Case and the spin disk made of Polypropylene (PP) to resist most of the corrosive solutions.
  • The digital control box is separated from the spin coater.
  • One two-stage vacuum pump is included for the spinning chamber and one dry pump for the vacuum chuck.
  • The digital vacuum gauge is installed on the top cover of the spin coater
  • One filter is included in the standard package. It is used to connect the pump and coater for preventing wastewater from flowing into the pump.
  • The sample can be held either by the mechanical fixture for liquid injection under vacuum  or by vacuum chuck for the liquid injection under an inert gas atmosphere

Input Power
  • Default 220VAC, 50/60Hz,  single phase, 1000W Max.
  • 110V is available in the optional bar ( with 1500W transformer )
  • A power socket on the back of the Digital control box is used to supply power to the vacuum pump. (The output voltage of this power outlet depends on the input voltage of the spin coater, e.g. if the spin coater is plugged into AC 110V, this power socket will supply AC 110V.)
Chamber  & Vacuum Chuck
  • Chamber diameter:  150 mm
  • PP anti-corrosive chuck which can hold substrate up to 6" Dia. either by vacuum or by the mechanical fixture
  • Vacuum chuck only can be used in the inert gas atmosphere
  • Mechanical chuck must be used for vacuum injection

Spin Speed
  • Digital control panel with six programmable segments of different spin times and speeds
  • Each step can run 999 S max.
  • 500 -10K RPM adjustable spinning speed  at each segment
Liquid Injecting

  • 20mL syringe is used to contain the coating material (Click Pic 1)
               - Pic 1      
Motor  24VDC, Brushless,  200W max.:
Product Dimensions

( click picture right to see details)
  Coater: 250mm Dia x 590mm (H)     Control Unit: 330mm(L) x 380mm(W) x 165mm (H)
Net Weight 25 kg 
  • CE Certified
  • NRTL or CSA certification is available upon request at the extra cost
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty

Operation Video
  • Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base.
  • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions 40"(L) x 30"(W) x 30"(H)
Shipping Weight 46 kg (100 lbs)

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