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Ultrasonic Spin-Spray Coater (0-3000 rpm, 12" Wafer Max) w/ Heater & Fume Hood - VTC-300BUSS

VTC-300BUSS Main Pic
VTC-300BUSS Main Pic
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Item Number: VTC-300BUSS
Transported by LTL Freight (Truck)

Ultrasonic Spin-Spray Coater VTC-300BUSS is an all-in-one film preparation equipment that combined ultrasonic atomization, spin coating, and drying functions, on a substrate up to 12" (300mm). The liquid is driven by a precision syringe pump with an optional heating function. The ultrasonic atomizer is able to swing over the substrate, thus ensuring the coating uniformity  (up to 4 ultrasonic heads). After coating, the film can be heated and quickly dried. The equipment adopts a touch screen control panel, and it can accurately control the parameters such as the ultrasonic power, spray rate, spinning speed, and heating temperature. 
Applications include thin-film preparation for perovskite solar cells, composites, and flexible films.


  • Power: 208 - 240 VAC, 50/60 Hz, single-phase, 1800 W in total
Spin Coater

  • One vacuum chuck for holding substrate up to 12" diameter or 8" square
  • One oil-less pump for the vacuum chuck is included and controlled by the spin coater
  • Spin speed: 300 - 3000 rpm programmable               
Ultrasonic Spray Nozzle

  • One ultrasonic generator (up to 50KHz, 100W) with two ultrasonic sprays nozzles 
  • Two spray nozzles with KF-25 adapters
    • One cylindrical type -- narrower spray ~20 mm diameter
    • One cone type -- wider spray ~40 mm diameter
    • Recommended compressed inert gas or air for the aqueous solution: ~2 psi ( not included)
    • Fluid viscosity range: 1 - 50 mPa·s (cP)
    • Particle size: 10-20 microns (suspension liquid), ≤10% solid
    • Flow rate: 0.6 pL-4 ml/min
  • One swing arm for mounting ultrasonic spray head.
    • Swing speed: 1°-20° /s
  • Optional: 2- 4 ultrasonic swing spray heads can be added for layer by layer coating at the extra cost

Syringe Pump

  • One syringe pump with LCD touch screen control is included for liquid delivery.
  • One 50 mL syringe is included. The unit can accommodate a syringe with 0.4-30 mm diameter
  • Pumping rate: 0.01-0.99mm/min  adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)
  • Options:  heatable and multi-channel syringe pump is available upon request at the extra cost                
Control Panel
  • Touch screen panel controls most of the parameters, includes
    • Spin speed:                  300 - 3000 RPM
    • Nozzle swing speed:    1-20°/s 
    • Temperature:                RT-80°C
    • Spraying time:              1- 999 seconds
    • Syringe pump speed>  0.6 pL-4 ml/min
Fume Hood & Heating 
  • The machine is built-in with a fume hood with a 4" venting port
  • IR heater is a built-inside hood with temperature control up to 80ºC for drying film after coating
  • LED light is inside the hood
Utility Requirement
  • Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI
  • Attention: If a gas cylinder is used instead of an air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator.
           pic1                pic2
Dimension and Net Weight
  • VTC-300BUSS_sizeweight:  250 lbs
  • CE Certified
  • NRTL certification is only available with compressive gas atomizing spray nozzle 
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Operation Manual & Video

Application Notes

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1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
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