Three Nozzles Spin-Mist Spray Coater (10-3000 rpm, 8" Wafer) - VTC-300SS-3

• Combined the benefits of both spinning and mist spraying, enabling dense and uniform liquid-phase coating onto a large substrate.
• Three spray heads to make multi-layer coating as program setting through touch screen control panel. 

• Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square.
• One oilless pump for the vacuum chuck is included and controlled by the spin coater.
• Spin speed: 10 - 3000 rpm adjustable.
• For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8".
  

Peristaltic Pumps

• Three peristaltic pumps are included for delivering three types of solutions as programmed.
• The three types of solution can be injected during spinning one by one with a set flow rate and duration time.
• The solenoid valves are connected to each pump to allow only one solution injection to avoid cross-contamination.
• Pumping Speed: 
• 0.1 - 100 rpm
• Roughly 0.14 ~ 140 ml/min

• The heatable top cover is available upon request at an extra cost.
• Heating element:  Ring type of halogen lamp.
• The precision digital controller is included with +/- 1ºC accuracy.
• Max. working temperature:  100ºC.

• The touchscreen control panel can set programs for
• Injection of solution sequence from  1 to 3  pumps
• Time of injection for each pump
• Number of cycles
• Spin Speed: 10 - 3000 rpm (not programmable)

• AC 110V/220V, 50/60 Hz

• 135 lbs

• Mist-Spray Spin Coater: 600mm(L) x 740mm(W) x 500mm(H)
• Controler: 510mm(L) x 460mm(W) x 200mm(H)

• 310 lbs
• 47" x 38" x 51"

• CE Certified

• One-year limited warranty with lifetime support
  
• The warranty does not cover rusting and damage due to improper storage condition or maintenance

• Compressive gas-driven spray heads - 40mm
• Rubber Plug for the spray head holder.
• PTFE Tube - 6.4mm OD and 6mm OD
• Rubber O-ring for the vacuum chuck

• It is the user’s responsibility to understand the risks associated with the process and use proper protection. The process must be confined in a fume hood (Pic. 1) with appropriate exhaust handling capability. 
• The film coating quality depends on the solution viscosity, substrate spin speed, heating, ultrasonic spray parameters, etc. The user is advised to experiment with the processing parameters for the best results
• Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the liquid residues in the bow/base. For more details about the cleaning procedures, please review the cleaning instruction for the spin coaters
• To achieve optimal coating quality, please consider cleaning the substrate with a plasma cleaner (Click pictures 2 & 3  below for more details) before coating. It will significantly reduce the surface tension on the substrates

       Pic. 1     

    Pic. 2   

 Pic. 3

• Strong Magnetoelectric Coupling in Ferrite/Ferroelectric Multiferroic Heterostructures Derived by Low-Temperature Spin-Spray Deposition
• Spin- and Spray-Deposited Single-Walled-Carbon-Nanotube Electrodes for Organic Solar Cells
• Rapid Assembly of Functional Nanocomposite Films Using Spin-Spray Layer-by-Layer Processing