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Three Nozzles Spin-Mist Spray Coater (10-3000 rpm, 8" Wafer) - VTC-300SS-3

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Item Number: VTC300SS3
Transported by LTL Freight (Truck)
VTC-300SS-3 is a Mist Spin-Spray Coater with compressive gas-driven spray heads for a multi-layer coating process on a large substrate up to 12". These three nozzles are adjustable up to 0.2MPa gas pressure.



  • Combined the benefits of both spinning and mist spraying, enabling dense and uniform liquid-phase coating onto a large substrate.
  • Three spray heads to make multi-layer coating as program setting through touch screen control panel. 
Spin Coater
  • Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square.
  • One oilless pump for the vacuum chuck is included and controlled by the spin coater.
  • Spin speed: 10 - 3000 rpm adjustable.
  • For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8".
Spray Nozzles
  • Three 40mm Compressive gas-driven spray heads ( included as standard )

Peristaltic Pumps

  • Three peristaltic pumps are included for delivering three types of solutions as programmed.
  • The three types of solution can be injected during spinning one by one with a set flow rate and duration time.
  • The solenoid valves are connected to each pump to allow only one solution injection to avoid cross-contamination.
  • Pumping Speed: 
    • 0.1 - 100 rpm
    • Roughly 0.14 ~ 140 ml/min
Heating Cover (optional)
  • The heatable top cover is available upon request at an extra cost.
  • Heating element:  Ring type of halogen lamp.
  • The precision digital controller is included with +/- 1ºC accuracy.
  • Max. working temperature:  100ºC.
Control Panel

  • The touchscreen control panel can set programs for
    • Injection of solution sequence from  1 to 3  pumps
    • Time of injection for each pump
    • Number of cycles
  • Spin Speed: 10 - 3000 rpm (not programmable)
Utility Requirement
  • AC 110V/220V, 50/60 Hz
Net Weight
  • 135 lbs

  • Mist-Spray Spin Coater: 600mm(L) x 740mm(W) x 500mm(H)
  • Controler: 510mm(L) x 460mm(W) x 200mm(H)
Shipping Weight & Dimensions
  • 310 lbs
  • 47" x 38" x 51"
  • CE Certified
  • One-year limited warranty with lifetime support
  • The warranty does not cover rusting and damage due to improper storage condition or maintenance
Operation Manual & Video
Consumable List
Application Notes

  • It is the user’s responsibility to understand the risks associated with the process and use proper protectionThe process must be confined in a fume hood (Pic. 1) with appropriate exhaust handling capability. 
  • The film coating quality depends on the solution viscosity, substrate spin speed, heating, ultrasonic spray parameters, etc. The user is advised to experiment with the processing parameters for the best results
  • Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the liquid residues in the bow/base. For more details about the cleaning procedures, please review the cleaning instruction for the spin coaters
  • To achieve optimal coating quality, please consider cleaning the substrate with a plasma cleaner (Click pictures 2 & 3  below for more details) before coating. It will significantly reduce the surface tension on the substrates
       Pic. 1         Pic. 2    Pic. 3
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