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Dual-Head 2” Magnetron Plasma Sputtering Coater in Glovebox - VTC-600-2HD-GB-LD


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Item Number: VTC-600-2HD-GB
Transported by LTL Freight (Truck)

VTC-600-2HD-GB is a compact magnetron sputtering system with dual 2" target sources in the glovebox.  The system will provide the environments of oxygen-free and humidity-free (<1 PPM ) for coating and processing air-sensitive thin film.  One DC source for coating metallic film, and the other RF source for coating non-metallic material. This coating system is designed for coating both single or multiple film layers for a wide range of materials, such as alloy, ferroelectric, semiconductor, ceramic, dielectric, optical, PTFE, etc. 

SPECIFICATIONS

Glovebox with Purification

  • Chamber dimension: 1200 mm L x 740 mm W x 900 mm H, made of stainless steel.
  • Hinged type front door for loading devices and sample easily
  •  Automic purging function for quickly removing O2 and H2O  before recirculating purification
  • Automatic regeneration function is built-in in the control panel
  • High-quality purification system ensures O2 and H2O below 1 PPM
  • Two Antechambers for large and small samples delivery
  • Please click the picture at the left-column for detailed specifications of the glovebox.

Sputtering Coater

  • The coater is recessed in the bottom of the glovebox with air-tight flange.
  • Two 2" magnetron plasma sputtering guns are installed on the top of the cover, which is a hinged type door. 
  • Two sputtering power sources are integrated into one control unit and are placed outside the glovebox.  
    • One DC source: 500 W power for coating metallic materials (Pic 1)
    • One RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)
  •         -- Pic 1           -- Pic 2     
  • Please click the picture at the left column to see the detailed specification of the sputtering coater

Input Power
  • Single-phase 220 VAC 50 / 60 Hz
  • 2500 W (including a vacuum pump and water chiller)






Magnetron Sputtering Head

  • Two 2" Magnetron Sputtering Heads with water cooling jackets and shutters are included (Click 1st pic)
    • One is connected to DC source for coating metallic materials
    • The other one is connected to the RF source for non-conductive materials
  • Target size requirement: 2" diameter
  • Thickness range: 0.1 - 5 mm for both metallic and non-conductive targets (including the backing plate)
  • One Stainless Steel Target target and one Research Grade Al2O3 target are included for demo testing
  • Recommended Sputtering Recipe and Useful Tips
  •                      




Vacuum Chamber

  • Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steel
  • Viewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacement
  • Hinged type lid with pneumatic power pole allows easy target change
                    on




Sample Stage

  • The sample holder is a rotatable and heatable stage made of the ceramic heater with copper cover
  • Sample holder size: 140 mm Dia. for. 4" wafer max
  • Rotation speed: 1 - 20 rpm adjustable for uniform coating
  • The holder temperature is adjustable from RT to 500 °C max (2 hr max) with accuracy +/- 1.0 °C via a digital temperature controller
                          

Gas & Flow Control

  • Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases
    • Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel
  • Air inlet valve is installed for vacuum release
  • 5N purity Ar gas is required for operating the coating system in the glovebox.
Vacuum Pump

Water Chiller
  • One digital temperature-controlled recirculating water chiller is included. (Click picture to see details)
    • Refrigeration range: 5~35 °C
    • Flow rate: 16 L/min
    • Pump pressure: 14 psi
    Optional
       
    • Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å     
    • Click the picture at left to see the detailed specification


    Overall Dimensions

              Lid closed: 48" × 28" × 32"                              Lid open: 48" × 28" × 37"

    Net Weight of Coater

    • 360 kg

    Compliance

    • CE approval
    • NRTL Certification (UL 1450) is available upon request at extra cost
                  

    Warranty

    • One year limited warranty with lifetime support


    Operation Demo Video

                             

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    Notices
    1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Prices vary from country to country.
    2. We may add extra charges for paper orders and NET 30 terms due to extra labor costs.
    3. The prices listed are subject to change without notice.