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Plasma Sputtering Coater with Three Sputtering Sources and RF/DC Power Supplies - VTC-600-3HD-LD


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Transported by LTL Freight (Truck)

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VTC-600-3HD-LD is a combinatorial plasma sputtering system with three 2“ magnetron sputtering sources and three RF/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and creates various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery). This system is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc.

SPECIFICATIONS

Compact Structure
          

Input Power
  • Single-phase 220 VAC 50 / 60 Hz
  • 2000 W (including a vacuum pump and water chiller)



Source Power


  • Three sputtering power sources are integrated into one control box (Click picture below to see detailed specs)
    • DC source: 500 W power for coating metallic materials (Pic 1)
    • RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)
          -- Pic 1           -- Pic 2     






Magnetron Sputtering Head

                      




Vacuum Chamber

  • Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steel
  • Viewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacement
  • Hinged type lid with pneumatic power pole allows easy target change
                    




Sample Stage

  • The sample holder is a rotatable and heatable stage made of the ceramic heater with copper cover
  • Sample holder size: 140 mm Dia. for. 4" wafer max
  • Rotation speed: 1 - 20 rpm adjustable for uniform coating
  • The holder temperature is adjustable from RT to 500 °C max (2 hr max) with accuracy +/- 1.0 °C via a digital temperature controller
                          

Gas Flow Control

  • Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases
    • Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel
  • Air inlet valve is installed for vacuum release
Vacuum Pump Station
    
  • A mobile pump station is included. The sputtering coater can be placed on top of the station
  • High-speed turbopump at speed 80L/S is combined with a two-stage mechanical pump (220 L/min) for max vacuum level and faster pumping speed
  • Standard vacuum level connected with chamber: < 4.0E-5 Torr.
  • Optional at extra cost
  • If choose a 150L/S high-speed turbopump, the vacuum can reach 10-6 torr with the chamber 。 
  • For the ultra-high vacuum up to 10^-7 torr, 700S/L turbopump is needed 
  •  150L/S high-speed turbopump        700L/S high-speed turbopump  
Water Chiller
  • One digital temperature-controlled recirculating water chiller is included. (Click picture to see details)
    • Refrigeration range: 5~35 °C
    • Flow rate: 16 L/min
    • Pump pressure: 14 psi



    Optional
    • Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å
    • Precision Thin Film & Coating Analysis Systems - EQ-TFMS-LD is available at extra cost
    • Various 2” oxide and metallic targets are available upon request at extra cost. Silver epoxy and copper backing plates can be ordered at MTI
                 


    Overall Dimensions

                Lid closed: 48" × 28" × 32"            Lid open: 48" × 28" × 37"

    Net Weight of Coater

    • 160 kg

    Shipping Weight & Dimensions

    • Total 3 Pallets
      • 365 lbs, 48" x 40" x 45"
      • 390 lbs, 48"x 40" x 49"
      • 210 lbs, 48" x 40"x 30"

    Compliance

    • CE approval
    • NRTLcertification is available upon request at extra cost, please contact our sales representative for the quote.

    Warranty

    • One year's limited warranty with lifetime support


    Operation Demo Video

                                          

    Application Note

    This coater may be placed into a standard glovebox with modification for thin-film battery research

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    Notices
    1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor costs.
    3. The prices listed are subject to change without notice.