Browse Categories
Search

Combinatorial Plasma Sputtering Coater with Three 2'' magnetron Sputtering Sources and RF/DC Power Supplies - VTC-600-3HD-LD


Please email for lead time
Transported by LTL Freight (Truck)

Product Options

Power Source:

Personalization

VTC-600-3HD-LD is a combinatorial plasma sputtering system with three 2“ magnetron sputtering sources and three RF/DC power supplies. Such a sputtering system is capable of co-sputtering up to three different target materials and creates various composition profiles across the substrate (e.g. ternary materials for Li-ion rechargeable battery). This system is also suitable for sequential coating of multiple layer films such as ferroelectric, alloy, semiconductor, ceramic, dielectric, optical, oxide, hard, PTFE, etc.

SPECIFICATIONS

Compact Structure
          

Input Power
  • Single phase 220 VAC 50 / 60 Hz
  • 2000 W (including a vacuum pump and water chiller)



Source Power


  • Three sputtering power sources are integrated into one control box (Click picture below to see detailed specs)
    • DC source: 500 W power for coating metallic materials (Pic 1)
    • RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)
          -- Pic 1           -- Pic 2     






Magnetron Sputtering Head

                      




Vacuum Chamber

  • Vacuum chamber: 300 mm Dia. x 300 mm Height, made of stainless steel
  • Viewport: Two pieces of 100 mm Dia. glass. One fixed; one detachable for cleaning and replacement
  • Hinged type lid with pneumatic power pole allows easy target change
                    




Sample Stage

  • The sample holder is a rotatable and heatable stage made of the ceramic heater with copper cover
  • Sample holder size: 140 mm Dia. for. 4" wafer max
  • Rotation speed: 1 - 20 rpm adjustable for uniform coating
  • The holder temperature is adjustable from RT to 500 °C max (2 hr max) with accuracy +/- 1.0 °C via a digital temperature controller
                          

Gas Flow Control

  • Two precision mass flow controllers (MFC) are installed to allow inlet of two types of gases
    • Flow rate: 0 – 200 mL/min & 0 - 100ml/min adjustable on the touch screen control panel
  • Air inlet valve is installed for vacuum release
Vacuum Pump Station
    
  • A mobile pump station is included. The sputtering coater can be placed on top of the station
  • High-speed turbopump at speed 80L/S is combined with a two-stage mechanical pump (220 L/min) for max vacuum level and faster pumping speed
  • Standard vacuum level connected with chamber: < 4.0E-5 Torr.
  • Optional at extra cost
  • If choose a 150L/S high-speed turbo pump, the vacuum can reach 10-6 torr  with the chamber  ( 6x10-7 torr with baking)
  • For the ultra-high vacuum upto 10^-7 torr, a getter pump (100L/s H2 & O2) is needed in addition to the turbopump. Please consult our engineers for detailed customization.
  •  150L/S high-speed turbo pump          Getter Pump
Water Chiller
  • One digital temperature controlled recirculating water chiller is included. (Click picture to see details)
    • Refrigeration range: 5~35 °C
    • Flow rate: 16 L/min
    • Pump pressure: 14 psi



    Optional
    • Precise quartz Film Thickness Monitor is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å
    • Precision Thin Film & Coating Analysis Systems - EQ-TFMS-LD is available at extra cost
    • Various 2” oxide and metallic targets are available upon request at extra cost. Silver epoxy and copper backing plates can be ordered at MTI
                 


    Overall Dimensions

                                            
              Lid closed: 48" × 28" × 32"         Lid open: 48" × 28" × 37"

    Net Weight of Coater

    • 160 kg

    Shipping Weight & Dimensions

    • Total 3 Pallets
    • 365 lbs, 48" x 40" x 45"
    • 390 lbs, 48"x 40" x 49"
    • 210 lbs, 48" x 40"x 30"

    Compliance

    • CE approval
    • NRTLcertification is available upon request at extra cost, please contact our sales representative for the quote. 
                  

    Warranty

    • One year's limited warranty with lifetime support


    Operation Instruction

                  
                             

    Application Note

    This coater may be placed into a standard glovebox with modification for thin film battery research

    Related Products

    Shopping Cart
    Your cart is empty.
    Please clear the browsing history before ordering the product. Otherwise, availability and price are not guaranteed.
    Mailing Lists
    MTI sponsorships:
    MTI Sponsors Thermoelectrics Workshop

    MTI-UCSD Battery Fabrication Lab

    MTI-VISTEC Cylindrical Cell  Pilot Line

    MTI Sponsors the Postdoctoral Awards

    Announcement:
    MTI and Celgard have successfully reached the settlement under court for the litigation on patent and trademark

    Upcoming Shows:

    MS&T 2019 Sep 29 - Oct 3 Portland OR Booth 614

    236th ECS Meeting Oct 13 - 17 Atlanta GA Booth 200

    2019 MRS Fall Dec 1 - 6 Boston MA Booth 901

    Recent Attended Shows:
    ICT/ACT 2019 Jun 30 - July 4 Gyeongju South Korea

    AABC 2019 Jun 24-27 San Diego CA


    2019 MRS Spring April 22 - 26 Phoenix AZ


    Click here to see our past conferences

     

    Notices
    1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor cost.
    3. The prices listed are subject to change without notice.