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2200ºC Top Seeded Solution Growth (TSSG) Furnace - VTF-2200X-TSSG


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Item Number: VTF-1600X-TSSG
Transported by LTL Freight (Truck)

VTF-2200X-TSSG is an ultra-high temperature TSSG (top seed solution growth) furnace for growing SiC or Sapphire via flux solution at 2000 degrees. The furnace is heated by an induction coil with a 4" dia graphite crucible and an 8" dia. hermetic quartz chamber. Temperature is detected by a type C thermocouple and controlled by a Eurotherm 3000 series temperature controller. It also equips a precision pulling device with a minimum pulling rate of 0.6 mm/hr and a minimum rotation speed of 0.1 rpm. It can be operated under vacuum, inert gas flow, or reducing environment. 

Power
  • 208 - 240VAC, three phases, 50/60Hz
  • 17 kW Max. A 60 A power panel is required. 
  • 10 feet long 6/4 AWG UL-approved power cable is included. 
  • The power plug is not included. Compatible plugs are available here.  
                
Induction Heating System
 
  • Max.Input Power:     15 KW
  • Output Frequency:    20 - 100 kHz 
  • Duty Cycle:               100%
  • Induction Coil:           220 mm(ID) x 65mm(H) 
  • Cooling:                     Water
  • Control mode:           PID or manual
  • Protection:                water flow interlock, over-temperature, and overpower protection
Heating Chamber


  • Quartz tube:          φ216mm(OD) x φ206mm(ID) x 500mm(H)
  • Top flange:            Special flange with one gas outlet and a pulling device. 
  • Bottom flange:      Special flange with a gas outlet, KF25 vacuum port, and 1/8" thermocouple feedthrough. 
  • Vacuum port:        KF25 port with a valve. 
  • Max. vacuum level: 10-5 torr by turbopump
Crucible and Thermal Insulation

  • One high purity graphite crucible with a lid: Ø114 OD x Ø100 ID x 142 H (mm)
  • Max. effective capacity:    750 ml (The melt should be less than 2/3 of the max volume)
  • Thermal insulation layer:  45 mm-thick three-layer graphite felt
  • Note:  the graphite felt and the crucible are consumable. Spare parts are available. 
  • Crucible rotation (optional): graphite crucible can be rotated at 0.1 - 23 rpm for better temperature uniformity. 

Temperature Control

  • Temp. Controller:               Eurotherm 3000 series controller with +/- 0.1 °C accuracy
                                                              with 28 programmable segments.  
  • Heating rate:                        0~60ºC / min     (suggestion at  =< 5ºC)
  • Working Temperature:         2000°C continuous (2200ºC less than 1 hr)
  • Thermocouple:                    1/8" type C thermocouple is placed against the bottom of the graphite surface.             

Pulling and Rotation Device

  • The pulling device is high vacuum compatible with SS bellow. 
  • Pulling rod:                    28 mm water-cooled SS rod
                                          YSZ or Alumina rod is available upon request
  • Pulling rate:                   0.8 - 50 mm/h  (Slower speed is available upon request. Up to 0.06 mm/h)
  • Fast pulling rate:           40 mm/min
  • Max Travel Distance:    300 mm
  • Rotation Speed:            0.1 - 23 rpm (Slower speed is available upon request up to 0.03 rpm)          
  • Optional recirculating water chiller for cooling seed rod:
  •   

Control Panel

  • 7" touch screen control panel for programming all parameters
    • Temperature programs
    • Seed rod rotation speed
    • Pulling speed
    • Store up to 5 recipes.

Vacuum Pump


Vacuum pump and high vacuum station
  • A vacuum pump or pumping station is recommended but not included. 
  • Vacuum level: 10-2 torr via a mechanical pump 
  •                        10-5 torr via a turbopump

Water Chiller

Dimension

1173L×1190W×2070H (mm)

Weight

200 kg

Warranty

  • One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement in the related products below.)

Compliance

  • CE Certified
  • NRTL(UL61010)  or CSA certification is available at extra cost. 

Operation Video

          

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Notices
1. Prices listed online are valid for the US market and who pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor costs.
3. The prices listed are subject to change without notice.