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Undoped AlN Template on 2" Silicon (Si <111> N type) 2"x 500 nm - FmAlNonSiPc50D05C1FT500nmUS

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Item Number: FmAlNonSiPc50D05C1FT500nmUS

AlN   Template on Silicon is made by a PVDNC method.   AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.


  • Useful area: 90%
  • Nominal AlN thickness: 500nm ±10%, one side coated, undoped AlN film
  • Front Surface: <1nm RMS,    as-grown
  • Back surface: silicon  N-type
  • AlN orientation: C-plane (00.1)
  • Macro Defect Density: <1/cm^2
  • Wafer base: Silicon [111] N type,  2" dia x0.5 mm, , one side polished

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