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Computerized Mass Flow Controller (Max. 1000 SCCM) - EQ-MFC-COM


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Product Options

Optional SCCM:
MFC-A is a digital mass flow controller for MTI's CVD/PECVD/Graphene furnace to control the gas flowing rate for different research purposes.
  • This product did not have a display, it must be controlled by the computer using manufacturer software.
  • Digital Mass Flow Controller for Gas Control Systems
  • Cost effective, High accuracy and fast response, Multi-gas, Auto-zero, Compatible interfaces.
  • Used for accurately controlling and measuring the gas flow rate of high pressure.
  • Ideal for CVD and other gas mixture applications.
  • International standard DB15 pin fitting; connects to MTI Furnaces with Swagelok1/4 fitting.
Specification

Full scale range (N2)

( 0~100,200,500,1000)SCCM

Other range can be customized at extra cost, please email to info@mtixtl.com

Accuracy

±1.0% S.P. (≥35% F.S.)

±0.35% F.S.(<35% F.S.)

Repeatability

±0.2% FS

Linearity

±0.5% FS

Response Time

≤1sec

Valve Rest Position

Normally Closed or Normally Open

Temperature Coefficient

Zero: ≤±0.05% F.S./℃

Span: ≤±0.1% F.S.℃(≤30 SLM)

Span: ≤±0.2% F.S.℃(>30 SLM)

Zero Drift

<0.6%F.S. per year without autozero

Surface Finish(Ra)

25Ra

Operation Temperature

(5~45)℃

Communication Interface for input Signal

Digital: RS485

DeviceNetTM

Analog:(0~5)VDC or (4~20)mA

Communication Interface for Output Signal

Digital: RS485

DeviceNetTM

Analog:(0~5)VDC or (4~20)mA

Power Supply

±11 ~ ±16 VDC or +11 ~ +28 VDC(400mA)

Electronic Connector

D-sub 9 pins male, D-sub 15 pins male,

DeviceNetTM male

Differential Pressure

(0.05~0.35) Mpa(≤10000SCCM

(0.1~0.35) Mpa(20000SCCM,30000SCCM)

(0.2~0.45) Mpa(50000SCCM)

Max Pressure

3MPa

Leak integrity

1×10-9 atm·cc / sec He(1×10-10 Pa·m3 / sec He)

Seals Materials

Viton; Neoprene

Surface Chemistry (EP only)

——

Fittings

Swagelok1/4”

Weight

1kg


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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.