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2 Channel ALD Control Unit with 4 Channel MFC Gas Delivery System - EQ-ALD-GSL-4

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Item Number: EQ-ALD-GSL-4

    EQ-ALD-GSL-4 is a two channels precision ALD precursor delivery unit with four channels MFC gas mixing and delivery system, which is designed for DIY an ALD coating system with any furnace or chamber for thin film growth and powder surface coating. The LCD touch screen provides easy control for ALD puls time and gas flow for each channel.   


Working Voltage

    AC 220V Single phase 50/60Hz


    100 W

PLC Touch Screen  

  • All parameters of ALD vapor pulse time and  Gas flow are controlled by PLC via a 6" touchscreen panel in a mobile cart 
    • Control Two ALD valves with pulse duration time and cycling with microsecond precision
    • Control For channels gas delivery with ±0.2%F.S via MFC
    • Display vacuum pressure 
    • Other parameters upon request of the customer
    • Please click picture left to see control interface
  •  RS485 Port and a supplied software are included for remote operation by PC.

 ALD Valves

  • Two ALD valves are required to deliver two type of  vaper precursors ( not included )
  • You may use your own ALD valve or click the picture below to order from us

Mass Flow Controller

  •  Four MFC is included to deliver 4 types of carrying gases independently or mixing 
    • Controlling Range:
    • Controller 1: 0~100 SCCM
    • Controller 2: 1~199 SCCM
    • Controller 3: 1~199 SCCM
    • Controller 4: 1~499 SCCM
    • Note: Other range MFC can be customized at extra cost upon request. ]
  • Working Temperature: 5~45 ºC
  • Max. Pressure: 3x10Pa
  • Accuracy: ±1.5% FS
  • Liner: ±(0.5-1.5)%F.S.
  • Duplicate accuracy: ±0.2%F.S.
    Gas Pipeline
  • One stainless steel gas mixing tank is built in
  • Internal pipeline: 1/4" O.D stainless steel
  • External pipeline: 1/4" O.D PTFE
  Gas Mixing Tank     Φ80X120mm

    Stop Valve & Fittings
  • 4 needle valves made of  316 Stainless Steel are included
  • Φ1/4” Swagelok Tube Fitting
  Dimensions     600mm(L) x 745mm(W) x 700mm(H)
  • All components are CE certified 
  • The unit can pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
    One year limited by lifetime support
  • You may consider ordering bubbler or vapor delivery system by click picture below
  • We can help you to connect the ALD control unit with MTI tube furnace at extra cost

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.