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Replacement 4 Channel Flow Readout Box for EQ-GSL-MC-3Z,EQ-MFC-B-4Z

Sale Price: Replacement Part for Existing Customers
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Item Number: EQ-MFC-B-4Z
4 Mass Flow Controller and 4 Monitor
Output Power
+15V ±5% 600mA    - 15V ±5% 1.2A
AC 220V ±10% 50/60Hz
Mass Flow Controller
(Click pic for details)

Voltage:                            185~245V 50/60Hz
Max. Output Power:          18W
Working Temperature:      5~45 ºC
Max. Pressure:                 3x10Pa
Accuracy:                          ±1% FS
Controlling Range:
  •   Controller 1: 0~100 SCCM
  •   Controller 2: 1~199 SCCM 
  •   Controller 3: 1~499 SCCM 

Other range can be customized at extra cost. Please email to 
Mechanical Pressure Gauge Measurement Range-0.1~0.15 MPa (0.01 MPa/grid)
  • Dimesion: 483 × 140 × 320 mm        
Weight 7.5KG
Compliance CE certified 
Warranty One year limited with lifetime support
Oxygen Monitoring (Optional)
An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:

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CVD & PECVD Furnace                                Click picture below to order bubbler or evaporator for CVD
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