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Gas Mixing Control Station with Three Channel Float Flowmeters and Valves - EQ-GSL-3F-SS

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Item Number: GSL3F-SS

The gas control system is designed for control of 1-3 types of gases flowing through vacuum sealed MTI tube furnaces in lower cost. The gas control system is installed in heavy duty mobile cart where tube furnace can be placed on the top. The front panels in the system will display  flow rate with adjust valves. Combining with MTI tube furnaces, it can be used as CVD system and annealing furnace to study gas environmental influence to materials.


Floating Flow-meter

Three Floating Flow-meter with various flow rate range and 4% FS accuracy

  • A: 10 - 100 mL/min
  • B: 16 - 160 mL/min
  • C: 25 - 250 mL/min
Mechanical Pressure Gauge (mixing tank) -0.1-0.15 MPa, (0.01 MPa/grit)
Vacuum needle valves (three)
  • Made of SS304
  • Installed in right side of cart
Pipe fitting: 1/4" pipe (nylon or stainless steel)
  • Three Gas Inlet fittings (from gas tanks) are Installed in right side of cart
  • Two channel gases flow into a gas mixer container and one gas channel independent (please review manual for drawing)
  • Two gas outlet fittings (to tube furnace) are installed in left side of cart (one for mixing gas and one independent)
  • 12' length 1/4" Nylon pipe is included for immediate use
Mobile Cart with four wheel and brake Dimensions: 600 mm (L) x 600 mm  (W) x 650 mm ( H)
Oxygen Monitoring (optional) An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:

CVD & PECVD Furnace                                  Click picture below to order bubbler or evaporator for CVD                         
Load limit 400 lbs
Net weight 165 lbs
Shipping dimensions 41 x 49 x 38 inch
Shipping weight 200 lbs
Warranty One year limited with lifetime support
Operation Manual

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