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        How to Choose MTI’s Sputtering/ Thermal Evaporation Coater Based on Application



MTI Equipment




Coating Gold or Ag for TEM and SEM sample < 2" Dia.

Low cost

 DC Magnetron Sputtering Coater


Coating carbon for both TEM and SEM sample < 1.5" Dia.


Multi-function Film Coater  Thermal Evaporating+Carbon Coating + Plasma Sputtering -GSL-1800X-SBC2-LD

Multi-function and better quality with built-in turbo pump


Coating Noble Metal for R&D Film < 2" Dia


3 Rotary Target Plasma Sputtering Coater w. Substrate Heater ( 500°C) - VTC-16-3HD

3 targets in one chamber for coating noble film


Coating All Metals for R&D Film < 2" Dia

Desktop Magnetron Plasma Sputtering Coater - VTC-16-SM

Magnetron coating with higher power ( 150mA),can sputtering light metal such as Al, C, Sn, Zn etc.


Coating most of the metallic and organic materials film up to 2" size from 200 ºC to 1500 ºC
(or 1200 ºC - 1700 ºC with optional B-type thermocouple).

Precision Temperature Controlled Hi-Vacuum Thermal Evaporating Coater - GSL-1700X-SPC-2

Hi-Vacuum Thermal Evaporating Coater


Coating for All non-conductive materials < 2" Dia

1” or 2”  RF Plasma Magnetron Sputtering Coater- VTC-2RF


Low cost

RF sputtering



Make optical coating ( Poly-crystalline) for all materials < 4" Dia.

Ultra-High Vacuum Thermal Evaporation Coater With Four Heating Sources(10-6 torr) - GSL-1800X-ZF4

Turbo pump and 4 evaporating boats in one chamber


Make an epitaxial film for all materials: conductive and non-conductive < 4" Dia.

DC/RF Dual-Head High Vacuum 2” Magnetron Plasma Sputtering Coater with Film Thickness Tracking System - VTC-600-2HD

Both High voltage DC and RF power with turbo pump designed for coating for all kinds of EPI thin film

5 guns RF plasma magnetron sputtering system designed for high throughput material genome initiative (MGI) thin film research

High-through put

Customized 1-5 Heads RF Plasma Magnetron Sputtering
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