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4" High Vacuum Magnetron Sputter Source with Quick Connector - HVMSS-SPC-4LD

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Item Number: HVMSS-SPC-4LD


The HVMSS-SPC-4 is a 4" diam. circular magnetron sputtering gun which can accommodate a wide range of sputtering targets, such as metallic/insulating or magnetic/non-magnetic. The circular rare-earth NdFeB permanent magnet is implemented to ensure excellent film uniformity and target utilization. Such a sputtering gun is easy to operate and maintain. Installation is straight forward and it can be operated with either DC or RF power supply.


  • Made of high-quality materials of stainless steel and ceramics. 
  • Electromagnetic finite element calculations are used in the design of the permanent magnetic assembly to achieve high field strength and uniform field profile. 
  • The magnet is coated with protective material against cooling water corrosion to maximize durability.
  • Standard RF connector, which matches with a wide range of DC and RF sputtering power supplies.
  • The low impedance sputtering heads are easily interfaceable with an external power supply.
  • Easy to install a standard fitting with included quick connector
  • Target replacement is easy and  no need to adjust the gun to fit targets with different height.
Power Requirement
  • DC (Max.) 2000 W
  • RF (Max.)  1000 W
Electrical Connection Type

  • Standard HN Female Connector is included (DC and RF, Picture below left )
  • Optional SL16 cable Connector   ( Picture below right)
  • 148 cm RF cable is recommended with extra cost (click Pic. right 1 to order)
Sputtering Current (Max.) 3 Amp
Sputtering Voltage 100-1000 V
Sputtering Pressure 3 - 50 mTorr
Operating Temperature  10 - 100oC

Sputtering Uniformity Curve
  • Total Length: 14"

Sputtering Target
  • Diameter:                         4.0" 
  • Thickness:                       up to 1/8" for non-magnetic target; up  to 1/16" for magnetic target
  • Utilization:                        up to 30%
  • Magnet:                            NdFeB Rare Earth Magnet

Cooling Water Requirement
  • Flow Rate:                         2.0 GPM
  • Water Inlet Temperature:     <20 C
  • Water tubing:                     0.25" O.D.
  • Feedthrough:                      3/4"
Net Weight 3.5 lbs

  • High vacuum Quick connector with 0.75" ID is included. Use this component to install the sputtering source onto the baseplate (up to 1” thick) of a vacuum chamber with  1” diameter through-hole at easy (click pic below left to see detail )
  • Digital Temperature Controlled Circulating Water Chiller with 6 Liters Tank, 16L / min Flow is available at extra cost, please click picture below right to order.
Operation Instructions
Warranty One year limited with lifetime support

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2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.