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Medium Plasma Cleaner with Vacuum Pump , 6"Dx 6.5" L ( 3 Liter) Quartz Chamber 13.56 Mhz, 30W max. - EQ-PCE-6

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Item Number: EQ-PCE-6
EQ-PCE-6 is medium plasma cleaner with 6" Dia x 6.5"Length quartz chamber.  It is designed to clean and remove nano-scale organic contamination on the substrate or wafer up to 4" using air, oxygen, or argon plasma. The rate of organic removal is about 20 nm/min Maximum at high RF power. It is an excellent tool to pre-clean single crystal substrate before epitaxial film deposition to achieve the better quality.  If you don't have experience with plasma surface cleaning, please refer to the articles as the follows:
  • McIntire, Theresa M., S. Rachelle Smalley, John T. Newberg, A. Scott Lea, John C. Hemminger, Barbara J. Finlayson-Pitts. "Substrate Changes Associated with the Chemistry of Self-Assembled Monolayers on Silicon." Langmuir (2006) 22(13): 5617-5624.
  • Sumner, Ann Louise, Erik J. Menke, Yael Dubowski, John T. Newberg, Reginald M. Penner, John C. Hemminger, Lisa M. Wingen, Theo Brauers, Barbara J. Finlayson-Pitts. "The Nature of Water on Surfaces of Laboratory Systems and Implications for Heterogeneous Chemistry in the Troposphere." Phys. Chem. Chem. Phys. (2004) 6: 604-613.
  • Mennicke, Ulrike, Tim Salditt. "Preparation of Solid-Supported Lipid Bilayers by Spin-Coating." Langmuir (2002) 18: 8172-8177.
Input Power

RF Power
  • RF power (High voltage & high-frequency current applied on the coil) is adjustable at three levels: Low Setting 7.2W; Medium Setting 10.2W; High Setting 30W
  • RF frequency:   13,56 MHz
Control Panel
  • Control Function: Clean time, RF Power, Vacuum Pump.

Plasma Chamber
  • 6" diameter x 6.5" length quartz chamber
  • 3 Liter Capacity
  • Hinged type door with viewing window for easy sample loading and observing
Vacuum Pump 
Inert Gas
  • Many inert gases can be chosen for plasma cleaning such as N2, Ar, Air, and Mixed gas depended on what kind material will be treated. ( not included in the package)
  • No flammable gas shall be used for the plasma cleaner
  • Combinations of PCE-6 plasma cleaner with Two Channel Gas Mixer will be a solution for introducing up to two process gases. Order plasma cleaner with the two-channel gas mixer from product options or Click the picture left for Two Channel Gas Mixer.
  • If use 4" wafer quartz boat, the cleaner can treat 25 pcs 2" Dia wafer per load 
    • 400mm L ×300mm W ×300mm H
    • 16" x 12" x 12" (inch)
    Net Weight       30 Lbs
    Shipping Weight & Dimensions
    • 140 lbs
    • 40"x30"x23"
    Warranty       One year limited warranty with lifetime support ( no warranty for Pyrex glass chamber )
    Application Note:       Positive Pressure may damage Plasma Quartz Chamber. 
    Operation Manual       

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