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5" Rotary CVD Tube Furnace with 3 Heating Zones and 4 Channel Gas Delivery System at 1200°C Max. - OTF-1200X-5L-R-CVD

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Item Number: OTF-1200X-5L-R-CVD
Transported by LTL Freight (Truck)

OTF-1200X-5L-R-CVD is a 5" rotary CVD tube furnace with 3 heating zones and 4 Channel precision gas delivery system. The furnace is designed for coating battery powder both anode and cathode for the next-generation battery
and is a cost-effective intermediate step in the upscaling process from laboratory to production scale.

Furnace Construction
  • Double shell casing with three cooling fans
  • High purity Alumina fibrous insulation for max. energy efficiency
  • DC Gear motor drives quartz tube with variable speed 0 - 10 RPM
  • The furnace can be electrically tilted up to 30°
  • Split cover enables faster cooling and easy operation.
  • All electric components are UL or Met recognized and ready to pass any safety test worldwide
Heating Zone length
  • Three zones: (600mm, 24" in total)
    • Zone 1: 150 mm  ( 6")
    • Zone 2: 300mm  ( 12")
    • Zone 3: 150 mm ( 6")
  • Constant temperature zone: 450 mm within +/- 2 ºC if two zones are at the same temperature.
Processing tube & Flange
  • Fused quartz tube (one is included)
  • Dimension:  130 mm O.D. x 120 mm I.D. x 1200 mm L + 60 OD mm (two ends )
    • Click the pics below to see details about the furnace's processing tube
          Four Mixing Blades                         Dimension
  • One pair of 60mm SS sealing flange with needle valves and the rotatable gas connector  is included for immediate use      
Gas Fittings
Inlet Fitting: Elbow Push-in connector for 6mm O.D tube; Outlet Fitting:  Elbow Push-in connector for 12mm O.D tube

Max. Working Temperature

  • 1100°C for continuously

  • 1200°C Max for < 1 hours

Optional Temperature Controllers         
  • Three PID digital temperature controllers with 30 programmable segments
  • RS485 port is built in to connect PC for remote control
  • Please click the picture to the left for ordering the software and chip at extra cost.
Temperature Uniformity
 +/- 1°C in heating Zone
Three Omega K type 3mm OD x 6" L with high-temperature tolerance (220°C) connector
Tube rotating Speed
0 - 10 RPM variable
Furnace tilt angle
0 - 30°
Chamber pressure
10-2 torr
 Production yield
 2 kg per batch
Vacuum and Filters
  • One heavy-duty mechanical vacuum pump  with Exhaust Filter  are  included 
  • One cold vacuum trap is included to avoid CVD contaminating the vacuum pump.
Gas Delivery System
  • Four channel precision gas mixing and delivery system with Touch Screen  is included for 1-4 kinds of gasses CVD
  • Note:  If using flammable gas in the system,  It must be placed in a fume hood with the suitable gas detector. You must get approved by professional safety personnel.
 4 KW Max
 208 - 240V single phase (30 A Breaker required)
 Warranty & Certificate One year limited warranty (consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, replacements are available at related products below.) 
Laptop, software & WiFi Control (Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: software is only compatible with MTI’s Yudian Temperature Controller

  • CE Certified
  • NRTL (UL61010)  or CSA certification is available at extra cost. ( please click marks below to learn details )
 Furnace dimension

With Lid Open With Lid Closed
Tilt At 0° 34° 34°
Length 60" 60" 60" 60"
Width 35" 35" 24" 24"
Height 66.5" 74" 58" 68"

 Net Weight
   130 kg   
 Shipping Weight &  Dimension
  • 600 lbs
  • 48"x40"x80"
Operation Video


Application Notes
  • The tube furnace with quartz tube is designed for use under vacuum and low pressure < 0.2 bars / 3 psi 
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C

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      1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
      2. We may add extra charges for paper order and net30 terms due to extra labor cost.
      3. The prices listed are subject to change without notice.