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Two Zone IR Heated RTP Tube Furnace (4'' ID ) with Slide-able Sample Holder under Vacuum -OTF-1200X-IR-IISL

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Item Number: OTF-1200X-IR-IISL
Transported by LTL Freight (Truck)
OTF-1200X-IR-IISL is dual zone IR heated RTP tube furnace with  4" ID quartz tube and slidable sample holder which is inside retractable bellows vacuum bellows.  It is capable of achieving a max. heating rate of 50°C/s  and a cooling rate  of 117°C/min. The furnace is designed for growing two dimension materials via HPCVD, where one heating zone is used as solid evaporating source and another zone for sample deposition.


Furnace Features

  • Double layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
  • Heated by shortwave IR tube lamps for fasting heating
  • Two heating zones, 195 mm each, total 390 mm in length for HPCVD
  • Sample holder is slidable in inside retractable bellows, which can achieve fast heating or cooling under vacuum or controlled atmosphere
  • Vacuum flanges and the digital vacuum gauge are installed  for immediate use.   
  • AC 208-240V, three phase, 50/60 Hz
  • 24 Kw
Heating Element
  • 16 pcs 1.5 Kw Halogen light tube,  ( Dia. =10mm,  L=390mm )
  • Standard working life: 2000 hrs.  ( depends on heating rate )
  • The Halogen light tube is consumable.  Please click picture left to order spare.
Max. Temperature
  • 900°C max (<  10 minutes )
  • 800°C (<  30 minutes )
  • 600°C ( continuous   )
Temperature Accuracy
  • +/ - 1°C
Max. Heating Rate
  • RT ~ 800ºC: 50  ºC/s
  • 800ºC ~ 900ºC: 10 ºC/s
Max. Cooling Rate
  • 60 ºC/min under 200mTorr environment
  • 117 ºC/min under atmospheric pressure
  • 10 °C/min slowest
Process Tube Size
  • High purity fused quartz tube
  • Φ110(OD)×Φ106(ID)×740(L), mm
Sliding Rails 
  • Dual sliding rails made of Cr plated steel
  • Sliding rail length: 400 mm
  • Two K type, 1/4" Dia x 24" length

Temperature Controller  

  • Two temperature controller included to control two zone independently via SCR
  • PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & thermocouple broken protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • RS485 Communications Port.
  • PC Control:  
    • An MTS-02 control module is included for PC control on this furnace.
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here

Vacuum Flanges

  • Stainless steel quick vacuum flanges are installed on both ends of the tube for easy assembling
  • 1/4"diameter  feedthrough on left flange  for inserting  K-type thermal couple
  • Digital vacuum gauge is included
  • KF25 right angle valve is installed for connecting to a vacuum pump
  • Needle valve for vacuum release is included
  • One  retractable bellows is installed on left flange, which allows sample hold sliding to cold under controlled vacuum or atmosphere

Vacuum Level 

  •  Limited by vacuum pump
    • 10^-2 torr can be achieved by mechanical pump
    • 10^-4 torr can be reached by molecular pump
  • The pump is not included . ( please clic picture below to order )

Water Cooling  (optional)

  • Cooling water is required.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest using the EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below) to save water.   


  • 1000mm×540mm×800mm

Net Weight

~180 Kg

Shipping Weight

500 lbs


One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control(Optional)

  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller



  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )


Application Notes

Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure < 0.12 MPa (absolute pressure).
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn How to set up quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
  • Quartz tubes should be replaced after every 10th use to ensure the best performance. 
  • Samples should never be placed on the tube directly; please order crucibles and boats from here.
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.

Operation Instructions


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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.