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1200ºC PE-HPCVD Rotary Furnace with In-situ Evaporator, 4 Channel MFC and Vacuum Pump - OTF-1200X-II-PEC4

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Item Number: OTF-1200X-II-PEC4
Transported by LTL Freight (Truck)
OTF-1200X-II-PEC4 is a 1200ºC Rotatable Two-Zone Plasma-Enhanced Hybrid-Physical-Chemical Vapor Deposition (PE-HPCVD) system. It consists a Titable Frame, 300W RF Plasma Generator & Matching Network, Up-Stream Source Evaporation Boat with Power Supply, Four Channel MFC Gas Delivery and High Performance Vacuum Pump. Such a complete system is an excellent tool for heat treating inorganic compound powders with superior temperature and suface coating uniformity (e.g. prepare Li-Ion battery cathode powders with conductive coatings on surface).


System Structure

  • 0~25° adjustable tilt frame assists smooth powder loading/unloading
  • Integrated 300W (13.56Mhz) RF power supply with matching network enables the plasma enhanced processing which significantly reduces the needs for high-temperature process
  • Gear driven tube rotation allows "blending" type processing for powders to achieve the best processing uniformity 
  • Four channel gas mixing station with MFCs provide precise control of gas delivery
  • The integration of Up-Stream Source Evaporation Boat with tungsten coil allows you sublimate solid precursors for the needs of Hybrid Physical-Chemical processing

Two-Zone Rotary Furnace

  • Working temp: 1200ºC Max(<1hrs)., and 1100ºC for continuous heating 
  • Two PID temperature controllers with 30 segments programmable.
  • Input Power: 208 – 240VAC, single phase at max. 2.5KW.
  • High purity Alumina fibrous insulation for max. energy saving
  • Gear DC motor drives quartz tube with variable speed 2 - 10 RPM
  • Split cover enables faster cooling and easy operation
  • Two zones: each zone length 8" (200 mm), total 16" (400 mm) heating zone
  • Constant temperature zone: 200 mm within +/-1oC if two zones at the same temperature.

Plasma RF Power Supply
  • Output Power:           5 -300W adjustable with ± 1% stability.
  • RF frequency:           13.56 MHz ±0.005% stability.
  • Reflection Power:      100W max.
  • Matching:                  Automatic
  • RF Output Port:         50 Ω, N-type, female
  • Noise:                       <50 dB.
  • Cooling:                     Air cooling.
  • Power:                      208-240VAC, Single Phase, 50/60Hz
Evaporation Boat  

  • Working temp: 1300ºC Max(<1hrs)., and 1200ºC for continuous heating (1500ºC with the furnace chamber heated to 800ºC)
  • 0.7ml alumina crucible with tungsten heating coil surrounded.
  • S type thermocouple insert for accurate temperature measurement of the source material.
  • 500W DC evaporation power supply with max. operating current @ 30Amps
Sealing Flanges
    • Standard:  4'' O.D Fused quartz processing tube, please click the pic on the left for details
    • One pair of 60mm SS sealing flange with rotatable gas connector needle valves and are included for immediate use
    Sealing Flanges
    • A pair of 1'' O.D quick disconnect flange with KF25 port are installed on each end of the tube
    • Magnetic fluid seal swivel coupling is used to enable the tube rotation without twisting the foreline or downstream attachments (such as gas, powder and electrical delivery lines)
                Left Flange Set             Right Flange Set
    Tube Rotation Speed
    • 0 - 5 RPM variable
    Furnace Tilt Angle
    • 0~30°
    Vacuum Pump & Gauge
    • EQ-FYP High-Performance Dual Stage Vacuum Pump is included in the sale, please click the image on the left to see detail specs.
    • KF25 adapter and stainless steel bellows are connected between pump and tube flange
    • 10E-2 Torr vacuum can be achieved inside the processing tube   
    • Note: Vacuum Gauge is available at additional cost, please click underline and to order

    MFC Gas Mixing Station
    • Four precision mass flow meters (0.02% accuracy) with digital displays are installed on the bottom case to control gas flow rate automatically. 
      • MFC 1: Gas flow range from 0~100 SCCM
      • MFC 2&3: Control range from 0~200 SCCM  
      • MFC 4: Control range from 0~500 SCCM
    • Gas inlet/outlet fittings: 6mm O.D tube fitting
    • Power: 208-240VAC 50/60Hz
    • Stainless steel needle valves for manual ON/OFF control of gas supply.
    • Large PLC touch screen control enable easy flow rate settings

    Temperature Control
    • Two heating zone design with individual temperature controller
    • Precise PID control of heating, cooling rate and dwell time, 30 programmable segments for 
    • Built-in overheating & broken thermocouple protection.
    • Over temperature protection and alarm allows for operation without attendant(s).
    • +/- 1 ºC temperature accuracy.
    • Three K-type thermocouples (one for each zone).
    • RS485 Communications Port.
    • Optional:  
      • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
      • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
    Volumetric Feeder and Collector Tank (Optional)
              Pic.1                        Pic.2
    • EQ-PF-1S automatic feeder includes a motor-driven agitator and stainless steel hopper with a built-in vibrator. It is designed for feeding solid powder into a furnace for continuous firing/heat treating. Please click the pic.1 on the left to order.
    • Stainless steel collection tank  ( 2 Liter Capacity ) can be installed on the other end of processing tube to gather the fired powder without exposure to air. Please click the pic.2 on the left to see details
    Dimensions & Weight

    • Furnace: 2800mm L x 800mm W x 1700mm H (with lid opened); Gas Mixing Station: 600mm L x 850mm W x 700mm H
    • Net weight: 400 Lbs.
    • Shipping Weight: 500lbs.
    One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order replacements at related products below).
    Laptop, software & WiFi Control (Optional)
    • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
    • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
    • A wireless remote control provides up to 300 meters operating range.
    • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
    • Note: 
      The software is only compatible with MTI’s Yudian Temperature Controller


    • CE Certified
    • All electric components ( >24V) are UL / MET / CSA certified
    • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
    • The tube furnaces with mullite tube are designed for using under vacuum and low pressure < 0.02 Mpa / 0.2 Bars / 3 PSI 
    • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.  
    • Never heat the furnace while the gas release valve is closed and a positive pressure condition exists within the furnace chamber. The pressure gauge must be used to closely monitor the chamber condition at all times during the heating process; please open the gas release valve immediately once the chamber pressure has reached over 3 PSI to prevent unforeseeable damages.
    • The flow rate for gasses should be limited to < 200 SCCM ( or 200ml/min )
    • Vacuum limit definition for all mullite tube furnaces: * Vacuum pressures may only be safely used up to 1300°C

    Operation Insturctions
               Installation Video                   Demo Video 

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    1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
    2. We may add extra charges for paper order and net30 terms due to extra labor cost.
    3. The prices listed are subject to change without notice.