Plasma cleaning involves the removal of impurities and contaminants from surfaces through the use of an energetic plasma created from gaseous species. Gasses such as argon and oxygen, as well as mixtures such as air and hydrogen/nitrogen. The plasma is created by using high-frequency voltages (typically kHz to >MHz) to ionize the low-pressure gas (typically around 1/1000 atmospheric pressure), although atmospheric pressure plasmas are now also common.
  UV Ozone Cleaner has proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants using intense 185 nm and 254 nm ultraviolet light. In the presence of oxygen, the 185 line produces Ozone and while the 254 line excites organic molecules on the surface. This combination drives the rapid destruction and decimation of organic contaminants. 

150℃ Heat-able UV-Ozone Cleaner w/ 6"x 6" Chamber & Quartz Holder- PCE-66H Sale Price: RFQ	Compact UV-Ozone Cleaner with 6"x 6" Chamber - EQ-PCE-66 Sale Price: USD$4,598.00	Compact UV-Ozone Cleaner with Stirring Function and Heating for Powder Cleaning - PCE-66MX Sale Price: RFQ
Desktop UV-Ozone Cleaner with 12" x 12" Chamber and Heating Stage up to 150C - EQ-PCE-22 Sale Price: RFQ	0.7 L Plasma Cleaner with Digital Vacuum Gauge, 3"Dx 6.5"L Quartz Chamber, 13.56 Mhz - EQ-PCE-3 Sale Price: RFQ	3 L Plasma Cleaner with Vacuum Pump & Digital Controller, 6"Dx6.5"L Quartz Chamber - EQ-PCE-6 Sale Price: RFQ
8.5" RF Plasma Cleaner / Etcher with Vacuum Pump. (12 Liter, 13.56 Mhz, 80W max.) - EQ-PCE-8 Sale Price: RFQ	Atmospheric Plasma Jet-Flow system (Plasma Pen) for Surface Treatment - GSL1100X-PJF Sale Price: RFQ	Atmospheric Plasma Beam with Automatic Scanning System and Heating Plate for Surface Treatment- GSL1100X-PJF-H Sale Price: RFQ
Atmospheric Plasma Beam with Automatic Scanning System for Surface Treatment- GSL1100X-PJF-A Sale Price: RFQ	Corona (Air Plasma) Surface Treatment System ( 20 or 30 cm width) for Substrate Cleaning by Roll to Roll - MSK-EC-200 Sale Price: RFQ