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Quartz Boat for Diffusion of 3" Wafer Processing (25 wafer/boat) - EQ-QB-3025

In stock
Item Number: EQ-QB-3025

Quantity Discounts

2 to 9USD$242.25
10 or moreUSD$229.50
  • 3" wafer boat is made of ultra-high purity quart (4N purity) with 1200oC working temperature
  • Can carry 25 piece wafers of 3" diameter x 0.5 mm thickness in each boat
  • Design for diffusion, oxidation and annealing 3" Si wafer
  • Can fit in MTI  OTF1200-4 tube furnace

OTF1200-4 tube furnace


Cross section drawing of 3" quartz boat in mm (length 180 mm )


3" wafer with quartz boat can be place into 4" tube


Place 3" wafer in center of furnace

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No Warranty:
Kindly note this item is a consumable part, and not covered by warranty. Make sure to inspect for defect(s) thoroughly before use. 

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