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Dual Quartz Tubes (5"/4") & Three Zones CVD Furnace upto 1200°C for Graphene Film - OTF-1200X-III-D5-4

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Item Number: OTF-1200X-III-D5-4
Transported by LTL Freight (Truck)


Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15" Laptop + USB-to-RS485 Cable

OTF-1200X-5-III-D4 is a dual tube and three-zone tube furnace with max. working temperature of 1200°C  for growing thin films on metallic foil by CVD, specially designed for make graphene and the flexible electrode for solar or battery electrode.



  • Dual quartz tube:  130 mm Dia (5"). outside tube suspended by 101 mm Dia (4")  tube inside. The metallic foil will be wrapped inside tube surface for CVD reaction
  • The dual tube which allows reactive gas go through between two tubes for reaction and forced air can go through the gap between tubes for uniform air flow with heating temperature all around the heating zone.
  • Max. Working Temperature:  1200°C   
  • Valve and vacuum gauge are included
  • Please click picture on the right to see principal of the furnace
Please click below for a related article:  "Roll-to-roll production of 30-inch graphene films for transparent electrodes "

Furnace structure
  • Three heating zones: (900mm, 36" in total)
    • Zone 1: 200mm  (7.87")
    • Zone 2: 430mm  (17.0")
    • Zone 3: 200 mm (7.87")
  • Max. 25" (625 mm) long with +/- 1°C accuracy if set three zones at the same temperature.
  • Three precision temperature controllers with 30 segment programmable and +/- 1° C accuracy.
  • Max. Working Temperature:  1200°C 
  • Continuous Working Temperature:  1100°C
  • Heating Rate: <= 20°C /min  
  • Constant Temperature Zone: 25" (625 mm) length (Three zones are heating at equal temperature simultaneously)

  •  AC 208-240V Single Phase, 50/60 Hz (40A breaker required).
  • 7 KW  Max.
  • Powder cord is included without a plug.
  • CE certified 
Processing Tubes
  • Two High purity Fused Quartz Tubes included
  • Outside tube: 130mm O.D. x 122 mm I.D. x 1485 mm
  • Inside tube: 104mm O.D. x   95 mm I.D. x 1545 mm

Vacuum sealed flanges
  • One pair of flange made of SS304, which seals tightly between tubes by two high-temperature O-rings (10-2 by the mechanical pump and 10-5 by the molecular pump ). 
  • The flange is built with water cooling jacket. When working temperature over 900°C, it is required to use cooling water. You may either use tap water or use our chilling water circulation at the picture below
  • One KF25 port is on the right flange to connect a vacuum pump.
  • One stainless steel needle valve is installed on right flange (please choose connector at the picture below before order)
  • Optional.  You may order a  Compact  Liquid Vaporization Systems for better CVD ( Click picture below right )

Thermal Block Placement
Temperature Controllers
  • Three PID automatic control with 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in overheating & broken thermocouple protection.
  • Over temperature protection and alarm allows for operation without attendant(s).
  • +/- 1 ºC temperature accuracy.
  • Three K-type thermocouples (one for each zone).
  • RS485 Communications Port.
  • Optional:  
    • The furnace may be operated by PC by installing a control module. Please order an MTS-02 control module at extra cost. 
    • If you order the PC control module together with the furnace, we will install and test it before shipping. We recommend you to order a computer laptop from us to avoid software installation problems. For more information please click here.
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
 Optional Copper Foil for Graphene Growth (150m length x 150mm width x 25um thickness) - EQ-bccf-25u
 Furnace Dimension 1030 x 430 x 580 mm  ( not included flange and tube )
Net Weight about 90 kg
Shipping package size after crating 65"x45"x35"
Warranty One year limited warranty for electrical parts. (Consumable parts such as processing tubes, O-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller


  • CE Certified
  • All electric components ( >24V) are UL / MET / CSA certified
  • The furnace is ready to pass TUV(UL61010) or CSA certification at extra cost. ( please click marks below to learn details )
Related instruction video
Updated idea
  • You may put the furnace on a 1200 mm length mobile cart ( click picture on left to order )
  • you may order our gas mixing module to support the furnace and deliver multi-gas to the dual tube furnace


Click here to learn the installation of a gas regulator
  • All quartz tube furnaces  are designed for using under vacuum and low pressure < 0.2 bars / 3 psi / 0.02 Mpa
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gasses should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  • For the use of flammable gasses such as H2 and CH4, please consult with MTI technical team for safety measures. We Strongly suggest that the furnace needs to be operated inside a fume hood with H2/CH4 leaking detector installed.
Application Note
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can be low.

Optional Vacuum Package (Chose high vacuum pump or low vacuum pump upon customer's requirement)
Description Quantity links Unit Price

High Vacuum Pump:  Movable Vacuum Pumping Station Combining Rough & Turbo Pump (up to 1E-7 mbar) with Completed Accessories - EQ-PV-HVS3

1 USD$16,850.00
Low Vacuum Dry Pump: Pfeiffer's High Speed ( 226L/min) Oilless Dry Vacuum Pump, 10E-3 Torr Limit - EQ-Adixen-ACP15 1 USD$6695.00
Digital Vacuum Gauge Up to 10-4 Torr 1 USD$465.95
Vacuum bellows with KF-D25 adapter (1m) 1 USD$199.95
1/4NPS to KF-D25 quick adapter 1
Quick Clamp with Rubber O-Ring for KF-D25 Vacuum adapter 2 USD$29.95
If PC control required, please order three sets of software and interface device here 1 USD$219.00

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1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.