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3 Zone Tube Furnace with 6" - 11" Quartz tube and Flange (1100°C, 12"+12"+12" Heating Zone) - GSL-1100X-XX-III


Transported by LTL Freight (Truck)

Product Options

tube size:

Personalization

Upgrade to Eurotherm Temp Programmer (three zone) Upgrade + 15" Laptop + USB-to-RS485 Cable
GSL-1100X-XX-III furnace is a CE certified three zone tube furnace with 6", 8.5" or 11"O.D quartz tube and vacuum flanges. Needle valves and, vacuum gauge are pre-installed for immediate use. Three 30 segment programmable controllers are built in with K type thermal couple. Microprocessor-based PID control provides excellent control without overshooting and +/- 1 ºC accuracy. It has been widely used for materials or chemical lab for sintering all types of new material samples under vacuum or other gases conditions. It is an excellent tool for annealing, diffusing and sintering processes.
SPECIFICATIONS
Model GSL-1100X-6-III GSL-1100X-8.5-III GSL-1100X-11-III
Fused quartz tube size
  • High purity quart tube
  • Warning: quartz tube is fragile, please handle with care. Warranty does not cover broken tube by use
Size:  
152 O.D x 143 I.D x 1300mm L
(6" O.D x 5.6" I.D x 51" L)
Size:  
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
Size:  
279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
NOTE: The customers must define one tube size before purchase. It is very difficult to change the tube size after because the chamber liners need to be replaced in order to fit the different tube size. 
Quartz boats (optional) max. 4" wafer boat compatible
Max. 6" wafer boat compatible

Max. 8" wafer boat compatible
    
Furnace structure
  • Double layer steel casing with air cooling.  The surface temperature of the case is < 70°C.
  • Refractory fibrous alumina insulation liner for maximum energy saving.
  • Heating element: NiCrAl Resistance Wire
  • Two fibrous ceramic tube blocks are included for blocking heat radiation from inside tube.   (Ceramic blocks must be fully inserted into the furnace chamber before heating
  • This furnace can be used as annealing or diffusion furnace for 8" wafer use a quartz boat at related product below
Structure schematic
11" ceramic tube。 Click to order spare
Holding 8" wafer
 

Heating zone
  • Total heating zone length 900 mm (36")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone:
    • 750 mm (if three zones are in the same temperature within +/- 3°C)  longitude direction
    • 600 mm  (if three zones are in the same temperature within +/- 1°C) longitude direction
    • +/- 3 oC along the cross section




Working temperature
  • Max heating temperature: 1100°C ( < 1 hour )
  • Normal working temperature: 200~1000°C
  • Max heating & cooling rate: 10°C/min
  • Temperature uniformity: please click the pic to enlarge
          
Temperature control
  • Three digital controllers with PID/self-tuning functions and 30 segments programmable.
  • Thermocouple: three K type thermocouples (one for each zone)
    Control accuracy: +/- 1°C
  • Software for PC control is available as optional ( click picture below to order )

              
European Temperature Controllers (optional upgrade)
  • 1 heating channel
  • 1 programs of 8 or 24 segment
  • Alarm Relay: Form 'A' and Form ‘C’ built-in 
  • Digital Communications: RS485
  • Temperature Accuracy:  ±  0.1ºC
  • Recipes: Using a PC tool recipes can be created that can be used to change the operating parameters of the 3000 simply by selecting a new recipe via the HMI. This is very useful where multiple products are processed using the same controller but require different parameters to be set.
Vacuum sealing & Flange
  • A pair of SS vacuum sealing flange (Hinged Type) and 4 pieces of high temp-resistance silicon O-ring are included.
  • Left Side Flange: Vacuum gauge, stainless steel needle valves and 1/4" barbed hose fitting.
  • Right Side Flange: KF40 vacuum port  with KF-40 Vacuum Right-Angle Valve  for easy connection to KF40 bellows and pump. ( If use pump with KF25 port, you will need a adapter KF40-KF25.
  • One 1/4" OD thermal couple insert port is built in the flange for easy temperature calibration.
  • Vacuum Level: 10-2 torr by heavy duty mechanical pump and 10-4 torr by regular turbo-pump.  5x10-7 torr can be reached by 700 L/s high speed turbo pump and modified flange adaptor
        
Optionals
 Click to enlarge
  •                    
Rated Voltage
  • Single Phase, 220V AC, 50/60 Hz
  • AWG 8# Power cord is included (without plug)
Power consumption
Max. 8KW (50A breaker required)
Product Dimension
1879 L x 680W x 920 H mm (74" L x 24.5" W x 37" H)
Net weight
200kg
Shipping dimension
80" x 40" x 70"
Shipping weight
800 lbs
Warranty
  • One year limited warranty for electrical parts. ( Consumable parts such as processing tubes, o-rings and quartz tube are not covered by the warranty)
  • You may order replacement quartz tube at the link below 
Laptop, software & WiFi Control(Optional)
  • Brand new laptop with Microsoft Window 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters operating range.
  • Above features are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note: 
    The software is only compatible with MTI’s Yudian Temperature Controller

        

Compliance
  • CE Certified
  • UL / MET / CSA Certification is available upon request, additional charges will apply
  • Temperature controller is MET and CE Certified
                       

NOTE
Operation Instructions     
Warning
  • Tube furnaces with quartz tubes are designed for using under vacuum and low pressure <  0.2 bar / 3 psi / 0.02 MPa    or  0.12 MPa (absolute pressure). 
  • Attention: A two stage pressure regulator must be installed on gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube


CONSUMABLE PARTS LIST
No. Description Quantity Picture GSL-1100X-6-III GSL-1100X-8.5-III GSL-1100X-11-III
01 Quartz tube 1 pc 152 O.D x 143 I.D x 1300mm L
(6" O.D x 5.6" I.D x 51" L)
216 O.D x 206 I.D x 1300mm L
(8.5" O.D x 8.1" I.D x 51" L)
279 O.D x 269 I.D x 1300mm L
(11" O.D x 10.6" I.D x 51" L)
02 Hinged type vacuum sealing assembly 1 set EQ-FL-152 EQ-FL-213 EQ-FL-278
03 O ring for flange cap 2 pcs EQ-SOR-152 EQ-SOR-213 EQ-SOR-278
04 O ring for inner flange 4 pcs EQ-SOR-168 EQ-SOR-230 EQ-SOR-295
05 KF-40 quick clamp 2 pcs EQ-KF-Clamp-D40
06 KF-40 right angle vacuum valve 1 pcs EQ-KF-Valve-D40
07 KF-40 Blank flange 2 pcs EQ-KF-BF

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Notices
1. Prices listed online are valid for US market and whom pay by credit card only. There will be extra charges for shipping & handling. Price various from country to country.
2. We may add extra charges for paper order and net30 terms due to extra labor cost.
3. The prices listed are subject to change without notice.